公开(公告)号：WO2015085014A1

公开(公告)日：2015-06-11

申请号：PCT/US2014/068461

申请日：2014-12-03

Applicant: MUÑOZ, David Callejo ,  ADAM, Joseph ,  LASWELL, Harry

Inventor： MUÑOZ, David Callejo ,  ADAM, Joseph ,  LASWELL, Harry

IPC: H01L21/301

CPC classification number: B23K26/0057 ,  B23K26/0006 ,  B23K26/0823 ,  B23K2203/56

Abstract: A method is described for obtaining a plurality of laminae, made of a material having known optical transparency characteristics, from an ingot made of the material, the ingot having an axis of symmetry (X), the method comprising: creating, in the ingot by use of a pulsed laser beam, a plurality of sacrificial layers with modified structure, the plurality of sacrificial layers being distributed along the axis of symmetry (X), the plurality of sacrificial layers dividing the ingot in a plurality of residual layers; subjecting the plurality of sacrificial layers to chemical etching, thereby causing a separation of the residual layers; and detaching the residual layers to produce the plurality of laminae made of the material.

Abstract translation: 描述了一种用于从由材料制成的锭获得具有已知光学透明特性的材料制成的多个薄片的方法，该锭具有对称轴（X），该方法包括：在锭中通过 使用脉冲激光束，具有改进结构的多个牺牲层，所述多个牺牲层沿对称轴线（X）分布，所述多个牺牲层将所述晶锭分成多个残余层; 对多个牺牲层进行化学蚀刻，从而导致残留层的分离; 并且分离剩余层以产生由该材料制成的多个层。