公开(公告)号：WO2014081043A2

公开(公告)日：2014-05-30

申请号：PCT/JP2013/081827

申请日：2013-11-20

申请人： NIKON CORPORATION ,  NIKON METROLOGY NV

发明人： GOODWIN, Eric Peter ,  SMITH, Daniel Gene ,  COOPER, Alexander ,  REZK, Mina ,  SLOTWINSKI, Anthony ,  HEDGES, Thomas

IPC分类号： G01S7/481 ,  G01S7/491 ,  G01S17/32

CPC分类号： G01S17/102 ,  G01S7/4812 ,  G01S7/4817 ,  G01S7/4818 ,  G01S7/4917 ,  G01S17/325 ,  G01S17/66 ,  G02B26/101 ,  G02B26/108

摘要： Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

摘要翻译： 激光雷达系统包括配置成相对于目标表面扫描测量光束的五棱镜。 聚焦光学组件包括用于调节测量光束聚焦的角立方体。 基于返回波束和本地振荡器波束之间的外差频率来估计目标距离。 本地振荡器束配置成在与返回光束混合之前传播到聚焦光学组件和/或从聚焦光学组件传播。 在一些示例中，使用具有固定到铝硅酸锂玻璃 - 陶瓷管的镜子的法布里 - 珀罗干涉仪来校准相对于目标距离的外差频率。

公开(公告)号：WO2023278262A1

公开(公告)日：2023-01-05

申请号：PCT/US2022/034854

申请日：2022-06-24

申请人： NIKON CORPORATION

发明人： SMITH, Daniel Gene ,  BINNARD, Michael Birk ,  PHILLIPS, Alton Hugh ,  DURKO, Heather Lynn ,  ICHINOSE, Go ,  NAITO, Kaneyuki

IPC分类号： B23K26/03 ,  B23K26/0622 ,  B23K26/352 ,  B23K26/36 ,  B23K26/60 ,  B64C21/10 ,  B23K101/34 ,  B23K2101/34 ,  B23K26/032 ,  B23K26/0624 ,  B23K26/355 ,  B23K26/3584 ,  B64F5/10

摘要： Systems and methods are disclosed that address the problem of large-scale optical manufacturing of microstructures. The systems and methods utilize one or more optical processing systems to generate a first set of alignment marks in a first region on a surface. The optical processing systems then move their focus to a second region on the surface. The second region generally partially overlaps the first region such that the optical processing systems can detect the location of the first set of alignment marks. The optical processing systems then generate a second set of alignment marks based on the location of the first set of alignment marks. This process is repeated in an iterative manner until alignment marks have been generated on all regions of the surface. The alignment marks can be used to optically align one or more optical processing systems configured to produce 3D structures on the surface.

公开(公告)号：WO2020198253A1

公开(公告)日：2020-10-01

申请号：PCT/US2020/024505

申请日：2020-03-24

申请人： NIKON METROLOGY NV ,  NIKON CORPORATION

发明人： SLOTWINSKI, Anthony ,  CHAMSINE, Ghassan ,  HEDGES, Tom ,  LIGHTOWLER, Paul ,  SMITH, Daniel Gene ,  HIDAKA, Yasuhiro ,  ARAI, Masanori

IPC分类号： G01S7/481 ,  G01S7/484

摘要： Laser radar include two part objective lenses that are used for imaging a target and directing probe beams to the target. Portions of tracer beams that degrade target images are attenuated with dichroic filters that block central portions of tracer beams. Local oscillator beams can be produced with a mixing lens that directs probe beams through a polarizing beam splitter to focus at or on a waveplate so that portions are reflected from the waveplate as local oscillator beams. An imaging system that is confocal with a probe beam is coupled to provide target measurements or to establish a focus of the probe beam.