公开(公告)号：WO2023278262A1

公开(公告)日：2023-01-05

申请号：PCT/US2022/034854

申请日：2022-06-24

申请人： NIKON CORPORATION

发明人： SMITH, Daniel Gene ,  BINNARD, Michael Birk ,  PHILLIPS, Alton Hugh ,  DURKO, Heather Lynn ,  ICHINOSE, Go ,  NAITO, Kaneyuki

IPC分类号： B23K26/03 ,  B23K26/0622 ,  B23K26/352 ,  B23K26/36 ,  B23K26/60 ,  B64C21/10 ,  B23K101/34 ,  B23K2101/34 ,  B23K26/032 ,  B23K26/0624 ,  B23K26/355 ,  B23K26/3584 ,  B64F5/10

摘要： Systems and methods are disclosed that address the problem of large-scale optical manufacturing of microstructures. The systems and methods utilize one or more optical processing systems to generate a first set of alignment marks in a first region on a surface. The optical processing systems then move their focus to a second region on the surface. The second region generally partially overlaps the first region such that the optical processing systems can detect the location of the first set of alignment marks. The optical processing systems then generate a second set of alignment marks based on the location of the first set of alignment marks. This process is repeated in an iterative manner until alignment marks have been generated on all regions of the surface. The alignment marks can be used to optically align one or more optical processing systems configured to produce 3D structures on the surface.

公开(公告)号：WO2021003271A2

公开(公告)日：2021-01-07

申请号：PCT/US2020/040498

申请日：2020-07-01

申请人： NIKON CORPORATION

发明人： PHILLIPS, Alton Hugh ,  ROSSI, Joseph P. ,  MARQUEZ, Johnathan Agustin ,  JEONG, Yoon Jung ,  GUO, Lexian ,  CHANG, Patrick Shih ,  GOODWIN, Eric Peter ,  BINNARD, Michael Birk ,  HERR, Brett William ,  BJORK, Matthew Parker-McCormick ,  COON, Paul Derek ,  ISHIKAWA, Motofusa

IPC分类号： B29C64/153 ,  B33Y10/00 ,  B33Y30/00 ,  B29C64/30 ,  B29C64/321 ,  B29C64/343 ,  B33Y40/00 ,  B29C64/236 ,  B29C64/245 ,  B29C64/329 ,  B29C64/255 ,  B22F12/37 ,  B22F12/90 ,  B22F10/85 ,  B22F12/52 ,  B22F10/20 ,  B22F10/28 ,  B22F10/30 ,  B22F12/00 ,  B22F12/46 ,  B29C64/205 ,  B33Y50/02

摘要： A processing machine (10) for building an object (11) from powder (12) includes a build platform (26A); a powder supply assembly (18) that deposits the powder (12) onto the build platform (26A) to form a powder layer (13); and an energy system (22) that directs an energy beam (22D) at a portion of the powder (12) on the build platform (26A) to form a portion of the object (11). The powder supply assembly (18) can include (i) a powder container (640A) that retains the powder (12); (ii) a supply outlet (639) positioned over the build platform (26A); and (ii) a flow control assembly (642) that selectively controls the flow of the powder (12) from the supply outlet (639).

公开(公告)号：WO2022192368A1

公开(公告)日：2022-09-15

申请号：PCT/US2022/019511

申请日：2022-03-09

申请人： NIKON CORPORATION ,  PHILLIPS, Alton Hugh

发明人： GOODWIN, Eric Peter ,  GOLDSTEIN, Goldie Lynne ,  RENWICK, Stephen Paul ,  BINNARD, Michael Birk ,  CHANG, Patrick Shih ,  ROSA, Matthew David ,  WELLS, Jonathan Kyle

IPC分类号： B29C64/153 ,  B29C64/245 ,  B29C64/241 ,  B22F10/28 ,  B22F12/37 ,  B22F12/90 ,  B22F10/31 ,  B22F12/00 ,  B33Y10/00 ,  B33Y30/00

摘要： The problem of correcting positioning errors in 3D printing processes is addressed by systems and methods that utilize sensing modules to determine a position or an orientation of a substrate (110) or a 3D printing build platform (120). A first sensing module (150) may determine a position or orientation of the substrate. The first sensing module may utilize a variety of light sources, reflective elements, optical detectors, and controllers to determine the position or orientation of the substrate. A second sensing module (160) may determine a position or orientation of the 3D printing build platform relative to the position or orientation of the substrate. The second sensing module may employ one or more fiducial markers to determine information indicative of the position or orientation of the 3D printing build platform. The position or orientation information determined by the first or second sensing modules may be used to correct errors in the 3D printing process.

公开(公告)号：WO2022192088A1

公开(公告)日：2022-09-15

申请号：PCT/US2022/018981

申请日：2022-03-04

申请人： NIKON CORPORATION

发明人： TYMINSKI, Jacek Kazimierz ,  BINNARD, Michael Birk

IPC分类号： H01J37/304

摘要： Directed energy beam deflections are compensated by mapping pixel coordinates of an image of a patterning field to patterning field spatial coordinates. For example, electron beam scanning is compensated by imaging calibration features defined on a reticle to produce a mapping between pixel and physical coordinates. An electron beam is scanned to produce cathodoluminescence at a plurality of scan locations in a patterning field. With the pixel coordinate mapping, an image of the cathodoluminescence is used to determine compensated scan drive values. Other directed energy beam deflections can be similarly compensated.

公开(公告)号：WO2021003202A2

公开(公告)日：2021-01-07

申请号：PCT/US2020/040391

申请日：2020-07-01

申请人： NIKON CORPORATION ,  PHILLIPS, Alton Hugh

发明人： CHANG, Patrick Shih ,  BINNARD, Michael Birk ,  ROSA, Matthew ,  KETSAMANIAN, Serhad ,  GUO, Lexian ,  HERR, Brett William ,  GOODWIN, Eric Peter ,  MARQUEZ, Johnathan Agustin ,  BJORK, Matthew Parker-McCormick ,  COON, Paul Derek ,  ISHIKAWA, Motofusa

IPC分类号： B22F3/105 ,  B29C64/241 ,  B29C64/245 ,  B29C64/393 ,  B33Y10/00 ,  B33Y30/00 ,  B33Y40/00 ,  B33Y50/02 ,  B29C64/268 ,  B29C64/371 ,  B22F12/37 ,  B22F10/28 ,  B22F12/00 ,  B22F10/31 ,  B22F12/226 ,  B22F12/38 ,  B22F12/41 ,  B22F12/45 ,  B22F12/90 ,  B22F2999/00 ,  B29C64/153

摘要： To improve the operation of 3D printing systems, techniques are disclosed for a rotary 3D printer comprising: a main rotating support table rotating about a first axis and one or more secondary support tables rotating around a non-coaxial secondary axis; a powder supply assembly for distributing powder onto the tables; and an energy system for directing an energy beam at the powder to form a part. The main support table and secondary support tables can rotate in the same or opposite directions. Disclosed techniques include: grooved support table surfaces for improving stability of applied powder; reciprocating bellows for controlling a differential load on actuators that move the support tables; high temperature bearings or bushings for supporting rotary motion at high temperatures; and a mechanism for counterbalancing a weight of the part being built.