公开(公告)号：WO2010041771A2

公开(公告)日：2010-04-15

申请号：PCT/JP2009/067952

申请日：2009-10-09

Applicant: NIKON CORPORATION ,  BINNARD, Michael, B. ,  GERY, Jean-Marc

Inventor： BINNARD, Michael, B. ,  GERY, Jean-Marc

IPC: H02K41/03 ,  H02K1/17

CPC classification number: H02K1/17 ,  H02K1/278 ,  H02K41/031 ,  H02K2201/18

Abstract: A planar motor (32) for positioning a stage (44) along a first axis, and along a second axis that is perpendicular to the first axis includes a conductor array (52) and a magnet array (34). The conductor array (52) includes at least one conductor (256). The magnet array (34) is positioned near the conductor array (52) and is spaced apart from the conductor array (52) along a third axis that is perpendicular to the first axis and the second axis. The magnet array (34) includes a first magnet unit (264) having a first diagonal magnet (Dl) with a diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. This leads to strong magnetic fields above the magnet array (34) and strong force generation capability. Further, the planar motor (32) provided herein has less stray magnetic fields that extend beyond the magnet array (34) than a comparable prior art planar motor. Moreover, the first magnet unit (264) can include a second diagonal magnet (D2), a third diagonal magnet (D3), and a fourth diagonal magnet (D4) that cooperate to provide a first combined magnetic flux (276) that is somewhat aligned along the third axis in a first flux direction. In this embodiment, each diagonal magnet (Dl) (D2) (D3) (D4) has the diagonal magnetization direction (268) that is diagonal to the first axis, the second axis and the third axis. Moreover, each diagonal magnet (Dl) (D2) (D3) (D4) can be generally triangular wedge shaped and the diagonal magnets (Dl) (D2) (D3) (D4) are arranged together into the shape of a parallelepiped.

Abstract translation: 用于沿着第一轴定位台（44）并且沿着垂直于第一轴的第二轴定位的平面马达（32）包括导体阵列（52）和磁体阵列（34）。 导体阵列（52）包括至少一个导体（256）。 磁体阵列（34）位于导体阵列（52）附近，并且沿着垂直于第一轴线和第二轴线的第三轴线与导体阵列（52）间隔开。 磁体阵列（34）包括第一磁体单元（264），第一磁体单元（264）具有与第一轴线，第二轴线和第三轴线对角的具有对角线磁化方向（268）的第一对角磁体（D1）。 这导致磁体阵列（34）上方的强磁场和强力产生能力。 此外，本文提供的平面电动机（32）具有比可比现有技术的平面电动机更少的超过磁体阵列（34）的杂散磁场。 此外，第一磁体单元（264）可以包括第二对角磁体（D2），第三对角线磁体（D3）和第四对角线磁体（D4），其协作以提供稍微有点的第一组合磁通（276） 沿着第三轴在第一磁通方向对准。 在该实施例中，每个对角线磁体（D1）（D2）（D3）（D4）具有与第一轴线，第二轴线和第三轴线对角的对角线磁化方向（268）。 此外，每个对角磁体（D1）（D2）（D3）（D4）可以是大致三角形的楔形，并且对角磁体（D1）（D2）（D3）（D4）被布置成平行六面体形状。

公开(公告)号：WO2008144219A1

公开(公告)日：2008-11-27

申请号：PCT/US2008/062779

申请日：2008-05-06

Applicant: NIKON CORPORATION ,  GERY, Jean-Marc ,  BINNARD, Mike

Inventor： GERY, Jean-Marc ,  BINNARD, Mike

IPC: A47B9/02

CPC classification number: G03B27/58

Abstract: A mover (344) that moves a stage (238) along a first axis includes a magnetic component (354), a conductor component (356), and a sensor (366). The magnetic component (354) includes one or more magnets (354D) that are surrounded by a magnetic field. The conductor component (356) is positioned near the magnetic component (354). Further, the conductor component (356) interacts with the magnetic component (354) to generate a force when current is directed to the conductor component (356). The sensor (366) can be used for determining a first axis component of a magnetic flux of the magnetic component (354) during operation of the mover (344). Further, the sensor (366) can be used to determine a side force (365) that along a second axis that is orthogonal to the first axis that is being generated by the mover (344). With this design, the mover (344) or other components can be controlled to compensate for the side force (370).

Abstract translation: 沿着第一轴线移动台架（238）的移动器（344）包括磁性部件（354），导体部件（356）和传感器（366）。 磁性部件（354）包括由磁场包围的一个或多个磁体（354D）。 导体部件（356）位于磁性部件（354）附近。 此外，当电流被引导到导体部件（356）时，导体部件（356）与磁性部件（354）相互作用以产生一个力。 传感器（366）可以用于在移动器（344）的操作期间确定磁性部件（354）的磁通量的第一轴分量。 此外，传感器（366）可以用于确定沿着与由移动器（344）生成的第一轴正交的第二轴线的侧向力（365）。 通过这种设计，可以控制动子（344）或其他部件以补偿侧力（370）。

公开(公告)号：WO2003071155A1

公开(公告)日：2003-08-28

申请号：PCT/JP2003/001717

申请日：2003-02-18

Applicant: NIKON CORPORATION

Inventor： ONO, Kazuya ,  GERY, Jean-Marc

IPC: F16F6/00

CPC classification number: G03F7/709 ,  F16F6/00 ,  F16F2228/063 ,  G03F7/70833

Abstract: An apparatus (400) for providing support between a first structure (402) and a second structure (404) is described. The apparatus includes a supporting member (406, 450), and first and second sections. The supporting member is mounted to the first structure and second structure, and has positive stiffness with respect to a lateral direction (r). The first section (414) has at least one magnetic member, and is coupled to the first structure. The second section (416) has at least one magnetic member, and is coupled to the second structure. The first and second sections present negative stiffness caused by magnetic attractive force at a neutral position, thereby canceling at least a part of the positive stiffness of the supporting member.

Abstract translation: 描述了一种用于在第一结构（402）和第二结构（404）之间提供支撑的装置（400）。 该装置包括支撑构件（406,450）以及第一和第二部分。 支撑构件安装到第一结构和第二结构，并且相对于横向（r）具有正刚度。 第一部分（414）具有至少一个磁性部件，并且耦合到第一结构。 第二部分（416）具有至少一个磁性部件，并且联接到第二结构。 第一和第二部分呈现由中性位置处的磁性吸引力引起的负刚度，从而抵消支撑构件的正刚度的至少一部分。