公开(公告)号：WO2016092368A2

公开(公告)日：2016-06-16

申请号：PCT/IB2015/002449

申请日：2015-12-08

Applicant: NISSIN ION EQUIPMENT CO., LTD.

Inventor： HORSKY, Thomas, N. ,  HAHTO, Sami, K.

IPC: H01J27/08 ,  H01J37/08

CPC classification number: H01J37/08 ,  H01J27/08 ,  H01J27/205 ,  H01J37/02 ,  H01J37/065 ,  H01J37/077 ,  H01J2237/022 ,  H01J2237/082 ,  H01J2237/31705

Abstract: A plasma generator for an ion implanter is provided. The plasma generator includes an ionization chamber for forming a plasma that is adapted to generate a plurality of ions and a plurality of electrons. An interior surface of the ionization chamber is exposed to the plasma and constructed from a first non-metallic material. The plasma generator also includes a thermionic emitter including at least one surface exposed to the plasma. The thermionic emitter is constructed from a second non-metallic material. The plasma generator further includes an exit aperture for extracting at least one of the plurality of ions or the plurality of electrons from the ionization chamber to form at least one of an ion beam or an electron flux. The ion beam or the electron flux comprises substantially no metal. The first and second non-metallic materials can be the same or different from each other.

Abstract translation: 提供了一种用于离子注入机的等离子体发生器。 等离子体发生器包括用于形成适于产生多个离子和多个电子的等离子体的电离室。 电离室的内表面暴露于等离子体并由第一非金属材料构成。 等离子体发生器还包括热离子发射器，其包括暴露于等离子体的至少一个表面。 热离子发射器由第二非金属材料构成。 等离子体发生器还包括用于从电离室中提取多个离子或多个电子中的至少一个的出射孔，以形成离子束或电子通量中的至少一个。 离子束或电子通量基本上不包含金属。 第一和第二非金属材料可以相同或不同。