公开(公告)号：WO2018208318A1

公开(公告)日：2018-11-15

申请号：PCT/US2017/032447

申请日：2017-05-12

Applicant: NOVA MEASURING INSTRUMENTS, INC.

Inventor： BEVIS, Christopher F. ,  LIU, Yungman Alan ,  REED, David Allen ,  CHEIFETZ, Eli ,  WEINGARTEN, Amit ,  KADYSHEVITCH, Alexander

IPC: H01J49/02 ,  H01J49/40

Abstract: An ion detector for secondary ion mass spectrometer, the detector having an electron emission plate coupled to a first electrical potential and configured to emit electrons upon incidence on ions; a scintillator coupled to a second electrical potential, different from the first electrical potential, the scintillator having a front side facing the electron emission plate and a backside, the scintillator configured to emit photons from the backside upon incidence of electrons on the front side; a lightguide coupled to the backside of the scintillator and confining flow of photons emitted from the backside of the scintillator; and a solid-state photomultiplier coupled to the light guide and having an output configured to output electrical signal corresponding to incidence of photons from the lightguide. A SIMS system includes a plurality of such detectors movable arranged over the focal plane of a mass analyzer.