公开(公告)号：WO2023078782A1

公开(公告)日：2023-05-11

申请号：PCT/EP2022/080109

申请日：2022-10-27

Applicant: PFEIFFER VACUUM ,  PFEIFFER VACUUM, INC.

Inventor： OBERBECK, Sebastian ,  NEEL, Thierry ,  VARENNES, Nicolas ,  KAMBARA, Hisanori ,  CAVAREC, Pierre-Emmanuel ,  CHAVANNE, Cécile

IPC: F04D19/04 ,  F04D27/02 ,  F04D29/58 ,  F04D29/70

Abstract: Turbomolecular vacuum pump (1) intended to be fluidically connected to a process chamber (101) of an equipment device (100), the vacuum pump (1) having a control unit (30) configured to control a heating device (21) and a cooling device (22) of the vacuum pump (1) and to communicate with a command unit (104) of the equipment device (100) in order to initiate a cleaning step (201), when requested by the equipment device (100), said cleaning step (201) comprising a heating phase (202), in which the control unit (30) controls the heating device to increase the internal temperature of the vacuum pump (1) for a heating duration (Tc), and a cooling phase (203), which follows the heating phase (202) and in which the control unit (30) controls the cooling device to lower said temperature for a cooling duration (Tr).

公开(公告)号：WO2022148745A1

公开(公告)日：2022-07-14

申请号：PCT/EP2022/050068

申请日：2022-01-04

Applicant: PFEIFFER VACUUM

Inventor： CAVAREC, Pierre-Emmanuel ,  CRIADO, Romain ,  ROGER, François ,  DULAC, Eric

IPC: F04D19/04 ,  F04D29/58 ,  F04D29/02

Abstract: A heating device (103) for a vacuum line (100) in which pumped gases are intended to circulate, characterized in that it comprises at least one radiating body (20) configured to radiate in the infrared when it is heated to a temperature above 150°C, the at least one radiating body (20) being arranged in the pumping path of the gases.

公开(公告)号：WO2023046712A1

公开(公告)日：2023-03-30

申请号：PCT/EP2022/076154

申请日：2022-09-21

Applicant: PFEIFFER VACUUM

Inventor： CAVAREC, Pierre-Emmanuel ,  NEEL, Thierry ,  CRIADO, Romain ,  ROGER, François ,  DULAC, Eric

IPC: F04D19/04 ,  F04D29/58 ,  F04D29/52

Abstract: Turbomolecular vacuum pump (1) comprising at least one heating rod (20) having at least one holding part (20a) and a heating part (20b) utilizing the Joule effect when the heating rod (20) is electrically powered, the holding part (20a) forming a sheath for the electrical supply wires to the heating part (20b), at least one connection duct (21) being at least partially arranged in a high-pressure stator (19) of the vacuum pump (1) for the passage of the holding part (20a), the heating part (20b) being received along at least one helical groove (14) of the high-pressure stator (19).

公开(公告)号：WO2022106075A1

公开(公告)日：2022-05-27

申请号：PCT/EP2021/067171

申请日：2021-06-23

Applicant: PFEIFFER VACUUM

Inventor： CAVAREC, Pierre-Emmanuel ,  CRIADO, Romain ,  ROGER, François ,  DULAC, Eric

IPC: F04D19/04 ,  F04D29/32 ,  F04D29/38

Abstract: A turbomolecular vacuum pump (1) configured to drive gases to be pumped from a suction orifice (6) to a discharge orifice (7), the turbomolecular vacuum pump (1) in which the surface of the internal bowl (15) of the rotor (3) arranged facing the shell (17) of the stator (2) capable of being cooled exhibits a higher emissivity than the outer surface (25) of the rotor (3) in fluidic communication with the pumped gases and/or the surface of the shell (17) of the stator (2) capable of being cooled arranged facing the internal bowl (15) of the rotor (3) exhibits a higher emissivity than the outer surface (25) of the rotor (3) in fluidic communication with the pumped gases.