公开(公告)号：WO2023078782A1

公开(公告)日：2023-05-11

申请号：PCT/EP2022/080109

申请日：2022-10-27

Applicant: PFEIFFER VACUUM ,  PFEIFFER VACUUM, INC.

Inventor： OBERBECK, Sebastian ,  NEEL, Thierry ,  VARENNES, Nicolas ,  KAMBARA, Hisanori ,  CAVAREC, Pierre-Emmanuel ,  CHAVANNE, Cécile

IPC: F04D19/04 ,  F04D27/02 ,  F04D29/58 ,  F04D29/70

Abstract: Turbomolecular vacuum pump (1) intended to be fluidically connected to a process chamber (101) of an equipment device (100), the vacuum pump (1) having a control unit (30) configured to control a heating device (21) and a cooling device (22) of the vacuum pump (1) and to communicate with a command unit (104) of the equipment device (100) in order to initiate a cleaning step (201), when requested by the equipment device (100), said cleaning step (201) comprising a heating phase (202), in which the control unit (30) controls the heating device to increase the internal temperature of the vacuum pump (1) for a heating duration (Tc), and a cooling phase (203), which follows the heating phase (202) and in which the control unit (30) controls the cooling device to lower said temperature for a cooling duration (Tr).

公开(公告)号：WO2021228490A1

公开(公告)日：2021-11-18

申请号：PCT/EP2021/059859

申请日：2021-04-16

Applicant: PFEIFFER VACUUM

Inventor： KAMBARA, Hisanori

IPC: F04D19/04 ,  F04D27/00 ,  F04D29/70 ,  F04D29/58 ,  F04C18/12 ,  F04C28/28 ,  G01F1/684 ,  G01F1/698 ,  G01B21/08 ,  G01B13/06

Abstract: Device (200) for monitoring a deposit of reaction by-products for the discharge (7) of a vacuum pump (1; 100), characterized in that it comprises - a thermal flowmeter (20) comprising a first temperature probe placed at an upstream location in the direction of flow of the gases at the discharge (7), a second temperature probe placed at a downstream location, a heating element interposed between the temperature probes, a substrate insulating the temperature probes and the heating element from one another and - a processing unit (22) configured to perform a measurement by the thermal flowmeter (20) in order to determine the presence of a deposit of reaction by-products at the discharge (7) as a function of the difference between the flow rate measured by the thermal flowmeter (20) and an estimated value of the flow rate of gas pumped by the vacuum pump (1; 100).

公开(公告)号：WO2021148525A1

公开(公告)日：2021-07-29

申请号：PCT/EP2021/051318

申请日：2021-01-21

Applicant: PFEIFFER VACUUM

Inventor： OLIVIER, Yann ,  NEEL, Thierry ,  REY, Lucas

IPC: F01C21/10 ,  F04C18/08 ,  F04C23/00 ,  F04C25/02 ,  F04C29/04 ,  F04C18/12 ,  F01C21/104 ,  F04C18/086 ,  F04C18/126 ,  F04C2220/12 ,  F04C2240/102 ,  F04C23/001

Abstract: Dry vacuum pump (1) in which the at least two pumping stages (1a-1f) each have an inlet (7) and an outlet (8) emerging from a respective half-shell (9, 10), the stator (2) also having a stator casing (15) surrounding the joined half-shells (9, 10), at least one groove (20) being provided in the stator casing (15) or in an external surface of the half-shells (9, 10) so as to form at least one transfer channel (21) by joining the stator casing (15) to the half-shells (9, 10), the at least one transfer channel (21) placing the outlet (8) of a pumping stage (1a-1e) in communication with the inlet (7) of the following pumping stage (1b-1f).

公开(公告)号：WO2020254043A1

公开(公告)日：2020-12-24

申请号：PCT/EP2020/063590

申请日：2020-05-15

Applicant: PFEIFFER VACUUM

Inventor： DECORDE, Paul ,  GRENIER, Yannick

IPC: F04C23/00 ,  F04C25/02 ,  F04C18/12 ,  F04C18/16

Abstract: L'invention concerne une pompe à vide (1) primaire de type sèche comportant un dispositif d'injection (9) configuré pour distribuer un gaz de purge dans les étages de pompage (2a-2e), le dispositif d'injection (9) comportant : - un premier capteur de pression (12) agencé sur une portion commune (15) du distributeur (10), - un deuxième capteur de pression (13a-13e) agencé sur chaque branche (16a-16e) du distributeur (10), et - une unité de contrôle (14) configurée pour générer un signal de commande par modulation de largeur d'impulsions pour le contrôle des vannes de régulation (11a-11e) indépendamment les unes des autres en fonction des différences de mesure de pression entre le premier capteur de pression (12) et les deuxièmes capteurs de pression (13a-13e).

公开(公告)号：WO2019192913A1

公开(公告)日：2019-10-10

申请号：PCT/EP2019/057792

申请日：2019-03-27

Applicant: PFEIFFER VACUUM

Inventor： SAXOD, Laurent ,  PILOTTI, Patrick

IPC: F04C23/00 ,  F04C25/02 ,  F04C27/00 ,  F04C29/02

Abstract: L'invention a pour objet une pompe à vide (1) de type sèche comportant : - au moins un carter d'huile (2), - au moins un étage de pompage (3e), - deux arbres (4) rotatifs portant respectivement au moins un rotor (5) s'étendant dans le au moins un étage de pompage (3e), les rotors (5) étant configurés pour tourner de façon synchronisée en sens inverse pour entrainer un gaz à pomper entre une aspiration (7) et un refoulement (8) de la pompe à vide (1), les arbres(4) étant supportés par des paliers lubrifiés par un lubrifiant contenu dans le au moins un carter d'huile (2), et - au moins un dispositif d'étanchéité (6a) aux lubrifiants interposé entre le au moins un carter d'huile (2) et un étage de pompage (3e) au niveau du passage d'arbre, caractérisée en ce que la pompe à vide (1) comporte en outre au moins un dispositif d'expansion (12) configuré pour réduire les variations de pression entre un volume côté pompage (11; 24) et le au moins un carter d'huile (2).

公开(公告)号：WO2006056410A1

公开(公告)日：2006-06-01

申请号：PCT/EP2005/012503

申请日：2005-11-23

Applicant: PFEIFFER VACUUM GMBH ,  LISMONT, Hedwig

Inventor： LISMONT, Hedwig

IPC: B22D17/14 ,  B22D17/02

CPC classification number: B22D17/14 ,  B22D17/04

Abstract: Die Erfindung betrifft ein verbessertes Vakuumdruckgussverfahren, insbesondere für Metalle und Metalllegierungen, die Al, Mg, Zn und Cu enthalten. Um die Güte der Bauteile zu verbessern wird vorgeschlagen, in mehreren Phasen des Druckgussprozesses Vakuum in Formhohlraum und Gießkammerraum zu erzeugen. Die Anwendung des neuen Verfahrens wird sowohl für Kaltkammer- als auch für Warmkammerdruckgießen vorgestellt.

Abstract translation: 本发明涉及一种改进的真空压力铸造法，特别是用于金属和金属合金，铝，镁，锌，和含Cu。 为了提高部件的质量，建议在多个模腔中的压力铸造工艺真空的阶段和铸造室空腔的产生。 新方法的应用被呈现为两个冷腔，以及用于热室压铸。

公开(公告)号：WO2023078598A1

公开(公告)日：2023-05-11

申请号：PCT/EP2022/074963

申请日：2022-09-08

Applicant: PFEIFFER VACUUM

Inventor： MANDALLAZ, Eric ,  OLIVIER, Yann ,  GUENARD, Rémi ,  SACCHET, Maxime

IPC: F04B41/06 ,  F04B25/00 ,  F04B37/14 ,  F04B39/12 ,  F04B49/035 ,  F04C23/00 ,  F04C25/02 ,  F04C28/06 ,  F04C28/02 ,  F04C29/12 ,  F04C28/26

Abstract: A multistage vacuum pump (1) is provided with pumping stages (3a, 3b, 3c) respectively comprising an inlet (E) and an outlet (S), the pumping stages (3a, 3b, 3c) being mounted in series between a suction (4) and a discharge (5) of the vacuum pump (1), a stator (2) comprising at least one stator element produced by assembling two complementary half-shells (2A, 2B) that meet at a joining surface (8), at least one evacuation channel (11) connected to the outlet (S) of a pumping stage (3a, 3b) and in fluidic communication with the discharge (5), and at least one valve (13) associated with the evacuation channel (11). The evacuation channel (11) is provided in one of the half-shells (2A, 2B), opening in at least one mouth in the joining surface (8) and the associated valve (13) is arranged between the two half-shells (2A, 2B), being mobile so as to shut off or free up the mouth of the evacuation channel (11), depending on a difference in pressure on either side of the valve (13).

公开(公告)号：WO2023001718A1

公开(公告)日：2023-01-26

申请号：PCT/EP2022/069940

申请日：2022-07-15

Applicant: PFEIFFER VACUUM

Inventor： HOUZE, François

IPC: F04C18/12 ,  F04C18/16 ,  F04C25/02 ,  F04C28/28 ,  F04C27/00

Abstract: Dry rough-vacuum pump (1) comprising a stator (11) formed by at least one end support (12a, 12b) coupled axially to at least two stator elements (13) assembled to form at least one pumping stage (8a, 8b, 8c, 8d), and two shafts (9) provided with rotors (10a, 10b, 10c, lOd) configured to turn in a synchronized opposite rotations manner in each pumping stage (8a, 8b, 8c, 8d). The vacuum pump (1) also includes a safety device (17) mounted sealingly on the end support (12a, 12b) and that envelops at least the stator elements (13) to form a containment volume (21) for the pumped gas between the stator elements (13) and the safety device (17).

公开(公告)号：WO2022148745A1

公开(公告)日：2022-07-14

申请号：PCT/EP2022/050068

申请日：2022-01-04

Applicant: PFEIFFER VACUUM

Inventor： CAVAREC, Pierre-Emmanuel ,  CRIADO, Romain ,  ROGER, François ,  DULAC, Eric

IPC: F04D19/04 ,  F04D29/58 ,  F04D29/02

Abstract: A heating device (103) for a vacuum line (100) in which pumped gases are intended to circulate, characterized in that it comprises at least one radiating body (20) configured to radiate in the infrared when it is heated to a temperature above 150°C, the at least one radiating body (20) being arranged in the pumping path of the gases.

公开(公告)号：WO2022008253A1

公开(公告)日：2022-01-13

申请号：PCT/EP2021/067230

申请日：2021-06-23

Applicant: PFEIFFER VACUUM

Inventor： BEAUJON, Emmanuel

IPC: F04C25/02 ,  H01L21/67 ,  F04C29/00

Abstract: Gas treatment device (6) configured to treat, at atmospheric pressure, the gases pumped by at least one rough pumping device (10), the gas treatment device (6) comprising a treatment chamber (26) and at least one discharge pipe (7) configured to connect a discharge (8) of the at least one rough pumping device (10) to an inlet (9) of the treatment chamber (26), characterized in that the gas treatment device (6) further includes at least one auxiliary pumping device (13) configured to lower the pressure in the at least one discharge pipe (7), situated less than 1 metre from the inlet (9) of the treatment chamber (26), such as less than 50 cm.