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公开(公告)号:WO2011063007A2
公开(公告)日:2011-05-26
申请号:PCT/US2010/057058
申请日:2010-11-17
Applicant: REC SILICON INC , OSBORNE, E., Wayne , SPANGLER, Michael, V. , ALLEN, Levi, C. , GEERTSEN, Robert, J. , EGE, Paul, E. , STUPIN, Walter, J. , ZEININGER, Gerald
Inventor: OSBORNE, E., Wayne , SPANGLER, Michael, V. , ALLEN, Levi, C. , GEERTSEN, Robert, J. , EGE, Paul, E. , STUPIN, Walter, J. , ZEININGER, Gerald
IPC: C23C16/442 , C23C16/44
CPC classification number: C23C16/442 , C23C16/24 , C23C16/4404 , C23C16/4417 , C23C16/45576 , H01L21/02532 , H01L21/0262 , Y10S118/05
Abstract: Fluidized bed reactor systems for producing high purity silicon-coated particles are disclosed. A vessel has an outer wall, an insulation layer inwardly of the outer wall, at least one heater positioned inwardly of the insulation layer, a removable concentric liner inwardly of the heater, a central inlet nozzle, a plurality of fluidization nozzles, at least one cooling gas nozzle, and at least one product outlet. The system may include a removable concentric sleeve inwardly of the liner. In particular systems the central inlet nozzle is configured to produce a primary gas vertical plume centrally in the reactor chamber to minimize silicon deposition on reactor surfaces.
Abstract translation: 公开了用于生产高纯度硅涂覆颗粒的流化床反应器系统。 容器具有外壁,位于外壁内部的隔热层,位于隔热层内部的至少一个加热器,位于加热器内部的可移除同心衬套,中心入口喷嘴,多个流化喷嘴,至少一个 冷却气体喷嘴和至少一个产品出口。 该系统可以在内衬的内部包括可移除的同心套筒。 在特定的系统中,中心入口喷嘴被配置为在反应室中央产生主气体垂直羽流,以使反应器表面上的硅沉积最小化。 p>
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公开(公告)号:WO2016025014A1
公开(公告)日:2016-02-18
申请号:PCT/US2014/070623
申请日:2014-12-16
Applicant: REC SILICON INC
Inventor: OSBORNE, E., Wayne , MILLER, Matthew, J. , SPANGLER, Michael, V. , ZEININGER, Gerald, A. , ONSTOT, William, J. , STUPIN, Walter, J.
CPC classification number: B01J8/1872 , B01J8/1818 , B01J8/1836 , B01J19/02 , B01J2208/00008 , B01J2208/00168 , B01J2208/00407 , B01J2208/00761 , B01J2208/00796 , B01J2219/0263 , B01J2219/029 , C01B33/027 , C01B33/029 , C01B33/03 , F27B15/06 , F27D1/0006 , F27D1/045
Abstract: Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.
Abstract translation: 公开了用于生产多晶硅涂覆颗粒材料的流化床反应器中的分段碳化硅衬垫,以及制造和使用分段碳化硅衬垫的方法。 还公开了用于接合碳化硅段的非污染接合材料。 一个或多个碳化硅段可由反应结合的碳化硅构成。
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公开(公告)号:WO2014074505A9
公开(公告)日:2014-05-15
申请号:PCT/US2013/068474
申请日:2013-11-05
Applicant: REC SILICON INC
Inventor: MILLER, Matthew , SPANGLER, Michael, V. , WEMP, Barry , OSBORNE, E., Wayne
Abstract: Embodiments of a probe assembly for a fluid bed reactor are disclosed. The probe assembly includes a fluid bed reactor (FBR) member, and a pressure tap comprising a wall defining a passageway within which the FBR member is located. Exemplary FBR members include, but are not limited to, a thermocouple, a seed pipe, a particle sampling line, a gas sampling line, a gas feed line, a heater, a second pressure tap, or a combination thereof. Disclosed embodiments of the probe assembly reduce or eliminate the need for support rods and rings within the fluid bed reactor, reduce component fouling within the reactor, and/or reduce product contamination.
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