公开(公告)号：WO2004044941A3

公开(公告)日：2004-08-12

申请号：PCT/US0335097

申请日：2003-11-05

Applicant: STEVENS INST TECHNOLOGY

Inventor： KUNHARDT ERICH ,  BECKER KURT

IPC: H01J20060101 ,  H01J7/24 ,  H01J17/00 ,  H01J17/04 ,  H01J37/32 ,  H01J61/28 ,  H05H1/24 ,  H05H1/46 ,  H01J17/49

CPC classification number: H01J37/32018 ,  H01J17/04 ,  H01J37/32036 ,  H01J37/32559 ,  H01J37/32623 ,  H01J2237/0206 ,  H05H1/2406 ,  H05H2001/2412

Abstract: A method and apparatus for stabilizing glow plasma discharges by suppressing the transition from glow-to-arc includes a perforated dielectric plate having an upper surface and a lower surface and a plurality of holes extending therethrough. The perforated dielectric plate is positioned over the cathode. Each of the holes acts as a separate active current limiting micro-channel that prevents the overall current density from increasing above the threshold for the glow-to-arc transition. This allows for a stable glow discharge to be maintained for a wide range of operating pressures (up to atmospheric pressures) and in a wide range of electric fields include DC and RF fields of varying strength.

Abstract translation: 通过抑制从辉光到电弧的转变来稳定辉光等离子体放电的方法和装置包括具有上表面和下表面的穿孔电介质板和延伸穿过其中的多个孔。 穿孔电介质板位于阴极上方。 每个孔用作单独的有源电流限制微通道，其防止总电流密度增加到辉光到电弧转变的阈值以上。 这允许在宽范围的工作压力（高达大气压力）下保持稳定的辉光放电，并且在宽范围的电场中包括具有不同强度的DC和RF场。