公开(公告)号：WO2021086841A1

公开(公告)日：2021-05-06

申请号：PCT/US2020/057510

申请日：2020-10-27

Applicant: TRUSTEES OF BOSTON UNIVERSITY

Inventor： BROWN, Keith Andrew ,  CAO, Wenhan ,  ALSHARIF, Nourin

IPC: G01Q20/02 ,  G01Q60/24 ,  G01Q70/06

Abstract: A system includes a probe assembly, a camera, and a control system. The probe assembly includes a rigid substrate, a compliant layer provided on the rigid substrate, one or more rigid probes arranged on the compliant layer to cover at least a portion of the compliant layer, and a reflective layer covering the one or more rigid tips and uncovered portions of the compliant layer. The camera is configured to generate image data from the probe assembly. The control system is configured to receive image data from the camera and develop a topographical image of a surface of a sample, based at least in part on the received image data.