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公开(公告)号：WO2022014838A1
公开(公告)日：2022-01-20
申请号：PCT/KR2021/005882
申请日：2021-05-11
申请人： 충북대학교 산학협력단
摘要： 본 발명의 원자 힘 현미경은, 샘플을 수용하는 샘플 스테이지; 상기 샘플 상에 배치되고, 탐침을 포함하는 캔틸레버; 상기 캔틸레버에 레이저 빔을 주사하는 레이저; 상기 캔틸레버에서 반사된 레이저 빔을 입력받는 포토 디텍터; 상기 샘플 및 상기 캔틸레버를 촬영하는 제1 카메라; 상기 캔틸레버 및 상기 레이저로부터 주사된 레이저 스팟을 촬영하는 제2 카메라; 및 상기 제1 카메라, 제2 카메라 및 포토 디텍터와 전기적으로 연결되고, 상기 제1 카메라, 제2 카메라 및 포토 디텍터로부터 획득한 데이터를 처리하는 프로세서를 포함할 수 있다. 본 발명의 원자 힘 현미경의 동작 방법은, 제1 카메라를 통해 캔틸레버 및 샘플의 위치를 감지하는 단계; 상기 샘플의 위치를 조정하는 단계; 제2 카메라를 통해 레이저 및 캔틸레버의 위치를 감지하는 단계; 상기 레이저를 정렬하는 단계; 포토 디텍터를 통해 레이저 빔의 위치를 감지하는 단계; 상기 포토 디텍터의 위치를 정렬하는 단계를 포함할 수 있다.
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公开(公告)号：WO2021086841A1
公开(公告)日：2021-05-06
申请号：PCT/US2020/057510
申请日：2020-10-27
摘要： A system includes a probe assembly, a camera, and a control system. The probe assembly includes a rigid substrate, a compliant layer provided on the rigid substrate, one or more rigid probes arranged on the compliant layer to cover at least a portion of the compliant layer, and a reflective layer covering the one or more rigid tips and uncovered portions of the compliant layer. The camera is configured to generate image data from the probe assembly. The control system is configured to receive image data from the camera and develop a topographical image of a surface of a sample, based at least in part on the received image data.
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公开(公告)号：WO2017114885A1
公开(公告)日：2017-07-06
申请号：PCT/EP2016/082812
申请日：2016-12-29
申请人： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , ECOLE NORMALE SUPERIEURE DE LYON , UNIVERSITE CLAUDE BERNARD LYON 1
发明人： BELLON, Ludovic
摘要： La présente invention concerne un procédé d'estimation d'une raideur d'une partie déformable d'un système incluant un détecteur à quatre photodiodes pour l'analyse d'au moins une caractéristique d'un échantillon, le procédé comprenant, les étapes consistant à : - recevoir (10) les signaux enregistrés par les quatre photodiodes, - calculer (20) des signaux résultants à partir des signaux enregistrés, - calculer (30) une corrélation croisée des signaux résultants calculés pour obtenir un signal intercorrélé, - estimer (40) la raideur de la partie déformable en fonction du signal intercorrélé.
摘要翻译： 解码方法技术领域本发明涉及一种解码方法 估计包括检测器的系统的可降解部分的刚度; 四个光电二极管用于分析至少一个样本特征，解码过程 包括由以下步骤组成的步骤： ： - 接收（10）由四个光电二极管记录的信号， - 计算（20）结果信号; 从记录的信号中， - 计算（30）所计算的计算信号的互相关，以获得互相关信号 - 估计（40）可变形部分的刚度。 信号功能互相关联。
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公开(公告)号：WO2016073999A1
公开(公告)日：2016-05-12
申请号：PCT/US2015/060275
申请日：2015-11-12
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02 , G01H9/00 , G01Q10/045
摘要： This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
摘要翻译： 本发明涉及一种组合SPM的计量扫描探针显微镜系统，该SPM采用光学杆装置来间接测量探头的位移，另一个SPM通过使用干涉检测方案直接测量探头的位移。
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公开(公告)号：WO2014083358A1
公开(公告)日：2014-06-05
申请号：PCT/GB2013/053172
申请日：2013-11-29
申请人： INFINITESIMA LIMITED
发明人： HUMPHRIS, Andrew
摘要： A method of performing a measurement routine on a probe, the probe comprising a cantilever extending from a support. An interferometer is operated to reflect a sensing beam with the cantilever thereby generating a reflected sensing beam and combine the reflected sensing beam with a reference beam to generate an interferogram. The interferometer generates a first interference measurement value at a first measurement time by measuring the interferogram and a second interference measurement value at a second measurement time by measuring the interferogram, The cantilever deforms to form a different shape between the measurement times. A change in height of the probe between the measurement times is estimated in accordance with a difference between the first and second interference measurement values, and corrected in accordance with the difference in shape of the cantilever between the measurement times.
摘要翻译： 在探头上执行测量程序的方法，所述探头包括从支撑件延伸的悬臂。 操作干涉仪以与悬臂反射感测光束，从而产生反射的感测光束，并将反射的感测光束与参考光束组合以产生干涉图。 干涉仪通过测量干涉图来测量第二测量时间的干涉图和第二干涉测量值，在第一测量时间产生第一干涉测量值。悬臂在测量时间之间变形以形成不同的形状。 根据第一和第二干涉测量值之间的差来估计测量时间之间的探头的高度变化，并且根据测量时间之间的悬臂的形状差进行校正。
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公开(公告)号：WO2014057268A1
公开(公告)日：2014-04-17
申请号：PCT/GB2013/052633
申请日：2013-10-09
申请人： INFINITESIMA LIMITED
IPC分类号： G01Q10/04 , G01Q20/02 , G01Q70/06 , G01N29/036 , B82Y35/00
CPC分类号： G01Q10/00 , G01N29/036 , G01N29/2418 , G01N2291/0255 , G01N2291/0256 , G01N2291/106 , G01Q10/045 , G01Q20/02 , G01Q70/06
摘要： A method of actuating a plurality of probes by delivering photothermal energy to the probes so that the probes are heated and deform relative to a sample. The photothermal energy is delivered to the probes by: directing an input beam into an optical device; transforming the input beam with the optical device into a plurality of actuation beamlets which are not parallel with each other; and scanning the actuation beamlets across the probes, optionally via an objective lens. A spacing between the actuation beamlets is different to a spacing between the probes so that only a subset (typically only one) of the actuation beamlets illuminates a probe at any instant. As the actuation beamlets scan across the probes the probes are illuminated in an illumination sequence. The actuation beamlets are controlled so that different amounts of photothermal energy are delivered to at least two of the probes during the illumination sequence.
摘要翻译： 通过将光热能递送到探针来致动多个探针的方法，使得探针相对于样品被加热和变形。 通过以下方式将光热能输送到探针：将输入光束引导到光学装置中; 将输入光束与光学装置一起变换为彼此不平行的多个致动子束; 并且可选地通过物镜扫描穿过探针的致动子束。 致动子束之间的间距不同于探针之间的间距，使得只有一个子集（通常只有一个）的致动子束在任何时刻照射探针。 当致动子束扫描探针时，探针以照明序列照亮。 控制致动子束，使得在照明序列期间不同量的光热能被传递到至少两个探针。
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公开(公告)号：WO2014033430A1
公开(公告)日：2014-03-06
申请号：PCT/GB2013/052033
申请日：2013-07-30
申请人： INFINITESIMA LIMITED
发明人： HUMPHRIS, Andrew , ZHAO, Bin
CPC分类号： G01Q10/00 , G01Q10/045 , G01Q20/02
摘要： Various methods of driving a probe of a scanning probe microscope are disclosed. One set of methods distribute the energy of a radiation beam over a wide area of the probe by either scanning the beam or increasing its illumination area. Another method changes the intensity profile of the radiation beam with a diffractive optical element, enabling a more uniform intensity profile across the width of the illumination. Another method uses a diffractive optical element to change the circumferential shape of the radiation beam, and hence the shape of the area illuminated on the probe, in order to match the shape of the probe and hence distribute the energy over a wider area.
摘要翻译： 公开了驱动扫描探针显微镜的探针的各种方法。 一组方法通过扫描光束或增加其照明面积而将辐射束的能量分布在探测器的宽区域上。 另一种方法用衍射光学元件改变辐射束的强度分布，使得能够在整个照明宽度上具有更均匀的强度分布。 另一种方法使用衍射光学元件来改变辐射束的圆周形状，并因此改变照射在探针上的区域的形状，以便匹配探针的形状并且因此将能量分布在较宽的区域上。
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公开(公告)号：WO2009063145A3
公开(公告)日：2009-07-16
申请号：PCT/FR2008001226
申请日：2008-09-03
申请人： CENTRE NAT RECH SCIENT , ECOLE NATIONALE SUPERIEURE D I , GIRARD SYLVAIN , GILLES HERVE , LAROCHE MATHIEU
发明人： GIRARD SYLVAIN , GILLES HERVE , LAROCHE MATHIEU
摘要： The invention relates to a detection device (1) for imaging an object (10), that comprises: a laser cavity (3) for transmitting an original light signal (3) at an original wavelength towards the object (10) in order to generate an evanescent wave at the surface of the object (10); a conversion means (11) adapted for converting the evanescent wave into a progressive signal; a re-injection means (12) adapted for injecting the progressive signal into the laser cavity in order to generate interference inside the laser cavity between the progressive signal and the original light signal; a detection means adapted for detecting the interference in order to determine the characteristics of the object; characterised in that the device includes a wavelength modification means (7) adapted so that the wavelength of the progressive signal injected into the laser cavity is different from the original wavelength.
摘要翻译： 本发明涉及一种用于对物体（10）成像的检测装置（1），其包括：激光腔（3），用于将原始波长的原始光信号（3）朝向物体（10）发射以产生 物体（10）表面处的渐逝波; 转换装置（11），适用于将渐逝波转换为渐进信号; 重新注入装置（12），其适于将渐进信号注入激光腔以在渐进信号和原始光信号之间在激光腔内产生干涉; 检测装置，适于检测干扰以确定物体的特性; 其特征在于，所述装置包括波长修改装置（7），所述波长修改装置适于使得注入所述激光腔中的所述逐行信号的波长不同于所述原始波长。
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公开(公告)号：WO2009018575A3
公开(公告)日：2009-04-23
申请号：PCT/US2008072107
申请日：2008-08-04
申请人： VEECO INSTR INC , PRATER CRAIG , SU CHANMIN , PHAN NGHI , MARKAKIS JEFFREY , CUSWORTH CRAIG , SHI JIAN , KINDT JOHANNES , NAGLE STEVEN , FAN WENJUN
发明人： PRATER CRAIG , SU CHANMIN , PHAN NGHI , MARKAKIS JEFFREY , CUSWORTH CRAIG , SHI JIAN , KINDT JOHANNES , NAGLE STEVEN , FAN WENJUN
CPC分类号： G01Q10/04 , G01Q10/065 , G01Q20/02 , G01Q60/38
摘要： A method and apparatus are provided that have the capability of rapidly scanning a large sample of arbitrary characteristics under force control feedback so has to obtain a high resolution image. The method includes generating relative scanning movement between a probe (215) of the SPM and a sample (112) to scan the probe through a scan range of at least 4 microns at a rate of at least 30 lines/sec and controlling probe-sample interaction with a force control slew rate of at least 1 mm/sec. A preferred SPM capable of achieving these results has a force controller having a force control bandwidth of at least closed loop bandwidth of at least 10 kHz.
摘要翻译： 提供一种具有在力控制反馈下快速扫描任意特征的大样本的能力的方法和装置，因此必须获得高分辨率图像。 该方法包括在SPM的探针（215）和样品（112）之间产生相对扫描运动，以以至少30线/秒的速率在至少4微米的扫描范围内扫描探针，并且控制探针样品 与力控制转换速率至少为1毫米/秒的相互作用。 能够实现这些结果的优选SPM具有力控制器，其具有至少10kHz的至少闭环带宽的力控制带宽。
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公开(公告)号：WO2008115862A3
公开(公告)日：2008-11-27
申请号：PCT/US2008057217
申请日：2008-03-17
申请人： VEECO INSTR INC , PHAN NGHI , CUSWORTH CRAIG
发明人： PHAN NGHI , CUSWORTH CRAIG
CPC分类号： G01Q10/02 , G01Q20/02 , G01Q30/025
摘要： A high-bandwidth SPM tip scanner includes an objective (34) that is vertically movable within the scan head to increase the depth of focus for the sensing light beam. Movable optics permit targeting of the sensing light beam on the SPM's probe (12) and permit the sensing light beam to track the probe during scanning. The targeting and tracking permit the impingement of a small sensing light beam spot on the probe (12) under direct visual inspection of focused illumination beam of an optical microscope (32) integrated into the SPM (10) and, as a result, permits the use of a relatively small cantilever with a commensurately small resonant frequency. A high-bandwidth tip scanner constructed in this fashion has a fundamental resonant frequency greater than greater than 500 Hz and a sensing light beam spot minor diameter of less than 10 µm.
摘要翻译： 高带宽SPM尖端扫描器包括可在扫描头内垂直移动的物镜（34），以增加感测光束的聚焦深度。 可移动光学器件允许在SPM探头（12）上瞄准感测光束，并允许感测光束在扫描期间跟踪探头。 瞄准和跟踪允许在集成到SPM（10）中的光学显微镜（32）的聚焦照明光束的直观目视检查下在探针（12）上碰撞小的感测光束点，结果允许 使用具有相当小的谐振频率的相对小的悬臂。 以这种方式构造的高带宽尖端扫描器具有大于500Hz的基本谐振频率和小于10μm的感测光束光点小直径。
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