公开(公告)号：WO2015126498A3

公开(公告)日：2015-11-05

申请号：PCT/US2014068209

申请日：2014-12-02

Applicant: UNIV CALIFORNIA

Inventor： NGUYEN CLARK T-C ,  ROCHELEAU TRISTAN O

IPC: H03L7/18

CPC classification number: H03B19/14 ,  H03B19/00 ,  H03B2200/0016 ,  H03H9/02007 ,  H03H9/171 ,  H03H9/2431 ,  H03H9/2436 ,  H03H9/2447 ,  H03H9/25 ,  H03K25/02 ,  H03L7/18

Abstract: A micro-electromechanical system (MEMS) frequency divider apparatus having one or more MEMS resonators on a substrate is presented. A first oscillator frequency, as an approximate multiple of the parametric oscillation frequency, is capacitively coupled from a very closely-spaced electrode (e.g., 40 nm) to a resonant structure of the first oscillator, thus inducing mechanical oscillation. This mechanical oscillation can be coupled through additional MEMS resonators on the substrate. The mechanical resonance is then converted, in at least one of the MEMS resonators, by capacitive coupling back to an electrical signal which is a division of the first oscillation frequency. Output may be generated as a single ended output, or in response to a differential signal between two output electrodes.

Abstract translation: 提出了一种在基板上具有一个或多个MEMS谐振器的微机电系统（MEMS）分频器装置。 作为参数振荡频率的近似倍数的第一振荡器频率从非常紧密间隔的电极（例如，40nm）电容耦合到第一振荡器的谐振结构，从而引起机械振荡。 该机械振荡可以通过衬底上的附加MEMS谐振器耦合。 然后，在至少一个MEMS谐振器中，通过电容耦合将机械谐振转换回到作为第一振荡频率的除法的电信号。 可以产生输出作为单端输出，或响应于两个输出电极之间的差分信号。