公开(公告)号：WO2012167076A2

公开(公告)日：2012-12-06

申请号：PCT/US2012040454

申请日：2012-06-01

Applicant: UNIV MICHIGAN ,  OK JONG G ,  AHN SE HYUN ,  GUO LINGJIE JAY

Inventor： OK JONG G ,  AHN SE HYUN ,  GUO LINGJIE JAY

IPC: B82B3/00 ,  B29C59/04 ,  C08J5/00 ,  C23C14/24

CPC classification number: G03F7/0002 ,  B81B2207/056 ,  B81C1/0046 ,  B82Y10/00 ,  B82Y40/00 ,  C08J3/24 ,  C08J2300/24 ,  C08J2363/00 ,  G02B5/1809 ,  G02B5/1852 ,  G02B5/3058

Abstract: Novel continuous high speed techniques are provided to fabricate high aspect-ratio microscale structures by using curable liquid materials on a deformable polymeric substrate by a mold-guided pattern formation process with a rigid mold. Methods comprise contacting a patterned surface of a rigid mold with a curable liquid material disposed on a moldable polymeric substrate. The patterned surface has one or more cavities defining at least one microscale feature, so that the curable liquid material flows into the cavity and the major surface is at least partially deformed during the contacting. The liquid is cured to form a cured polymer having the at least one microscale feature over the moldable polymeric substrate.

Abstract translation: 提供了新的连续高速技术，以通过使用刚性模具的模具引导图案形成方法，在可变形聚合物基底上使用可固化液体材料来制造高纵横比微结构。 方法包括将刚性模具的图案化表面与设置在可模制聚合物基底上的可固化液体材料接触。 图案化表面具有限定至少一个微细特征的一个或多个空腔，使得可固化液体材料流入空腔中，并且主表面在接触期间至少部分变形。 将液体固化以形成在可模制的聚合物基材上具有至少一个微观特征的固化的聚合物。

公开(公告)号：WO2010120982A2

公开(公告)日：2010-10-21

申请号：PCT/US2010031169

申请日：2010-04-15

Applicant: UNIV MICHIGAN ,  AHN SE HYUN ,  GUO LINGJIE J

Inventor： AHN SE HYUN ,  GUO LINGJIE J

IPC: B82B3/00 ,  B82B1/00

CPC classification number: G02B5/1809 ,  B82Y20/00 ,  G02B5/1852 ,  G02B2207/101

Abstract: Nanoscale grating structure can be utilized in many practical applications in optics, flat-panel displays and bio-sensors. A Dynamic Nano-Inscribing (Dynamic Nano-Inscribing) technique is disclosed for directly creating large-area, truly continuous nano-grating patterns in a variety of metal or polymer materials with feature size down to sub-50 nm and at very high speed (10 cm/sec). Dynamic Nano-Inscribing is carried out under either ambient temperature or with a brief heating time on the order of ten microseconds, which minimizes damage on UV or thermo-sensitive functional materials.

Abstract translation: 纳米尺度光栅结构可用于光学，平板显示器和生物传感器的许多实际应用中。 公开了一种动态纳米印刷（Dynamic Nano-Inscribing）技术，用于直接在多种金属或聚合物材料中直接制造大面积，真正连续的纳米光栅图案，其特征尺寸低至低于50nm并以非常高的速度（ 10厘米/秒）。 动态纳米刻字在环境温度下或短时间内加热10分钟左右进行，最大限度地减少对UV或热敏功能材料的损伤。