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公开(公告)号：WO2022069444A1
公开(公告)日：2022-04-07
申请号：PCT/EP2021/076595
申请日：2021-09-28
Applicant: UNIVERSITY OF LIMERICK , TECHNOLOGICAL UNIVERSITY DUBLIN
Inventor： LEEN, Gabriel , MCGUINNESS, Fintan , ALI, Muhammad Mahmood , LEWIS, Elfed , OUBAHA, Mohamed
IPC: G01L9/00 , G01L9/0042 , G01L9/0079
Abstract: The present invention relates to a diaphragm for a pressure sensor, the diaphragm comprising a hybrid sol-gel film. The invention also extends to a process for the manufacture of said diaphragm for a pressure sensor and to a pressure sensor comprising said diaphragm.
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