METHOD FOR FABRICATION OF RIDGE WAVEGUIDES
    1.
    发明申请

    公开(公告)号:WO2020254799A1

    公开(公告)日:2020-12-24

    申请号:PCT/GB2020/051459

    申请日:2020-06-17

    Abstract: A method for fabricating an optical waveguide comprises: providing a sample of lithium niobate doped with magnesium oxide and having at least one grating of periodic domain inversion defined therein; applying a layer of metallic zinc to a surface of the sample over the at least one grating using sputter deposition; heating the sample in an atmosphere of pure oxygen to cause the zinc to indiffuse into the lithium niobate to form a waveguiding layer of increased refractive index under the surface of the sample; and using a dicing blade to cut two substantially parallel channels along a length direction of the at least one grating, to define a ridge waveguide between the two channels.

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