HYBRID PROBE HEAD ASSEMBLY FOR TESTING A WAFER DEVICE UNDER TEST

    公开(公告)号:WO2019231928A1

    公开(公告)日:2019-12-05

    申请号:PCT/US2019/034204

    申请日:2019-05-28

    Abstract: A hybrid probe head assembly for testing a wafer device under test includes a housing, at least a portion of a lead frame assembly disposed in the housing, the lead frame assembly including a at least one cantilever portion, the at least one cantilever portion including an undeflected position and a deflected position, where the lead frame assembly hinges between the undeflected position and the deflected position at a lead frame pivot point, and the at least one cantilever portion extends to a wafer contact. In the undeflected position, the at least one cantilever portion is disposed at a 8 - 12 degree angle, and in the deflected position, the at least one cantilever portion is disposed at a 2 - 4 degree angle. One or more spring probes are disposed within the housing and have a wafer contact tip.

Patent Agency Ranking