公开(公告)号：WO2002090882A1

公开(公告)日：2002-11-14

申请号：PCT/US2002/009158

申请日：2002-03-25

Applicant: ZYGO CORPORATION ,  KÜCHEL, Michael

Inventor： KÜCHEL, Michael ,  DECK, Leslie, L. ,  STEPHENSON, David ,  GRATRIX, Edward, J. ,  ZANONI, Carl, A.

IPC: G01B9/02

CPC classification number: G02B27/48 ,  G01B9/0201 ,  G01B9/02022 ,  G01B9/02034 ,  G01B9/02057 ,  G01B9/02069 ,  G01B9/02082

Abstract: Interferometric apparatus and methods for reducing the effects of coherent artifacts in interferometers. Fringe contrast in interferograms is preserved while coherent superposition of unwanted radiation generated in the interferometer (500) are suppressed. Use is made of illumination and interferogrammetric imaging architectures that generate individual interferograms of the selected characteristics of a test surface (522) from the perspective of different off-axis locations of illumination in an interferometer (500) and then combine them to preserve fringe contrast while at the same time arranging for artifacts to exist at different field locations so that their contribution in the combined interferogram is diluted.

Abstract translation: 用于减少干涉仪中相干伪像的影响的干涉仪和方法。 保留干涉图中的边缘对比度，同时抑制在干涉仪（500）中产生的不想要的辐射的相干叠加。 使用照明和干涉测量成像架构，其从干涉仪（500）中的照明的不同离轴位置的角度产生测试表面（522）的选定特征的单独干涉图，然后将它们组合以保留条纹对比度， 同时在不同的场地安排人造物存在，使得它们在组合干涉图中的贡献被稀释。