摘要:
The invention relates to processes for producing and using amidoxime compounds with low trace metal impurities. The invention further relates to compositions comprising amidoxime compounds with low trace metal impurities, such compositions useful for cleaning or removing residues from semiconductor substrates and/or equipment.
摘要:
It is an object of the present invention to provide a process for producing a hydroxylamine by reacting a salt of hydroxylamine with an alkali compound, where the yield reduction due to formation of a complex between the produced hydroxylamine and a salt produced as a by-product or adsorption of the hydroxylamine to the by-product salt is decreased, and a high-concentration and high-purity hydroxylamine is safely produced at a high yield. The process for producing a hydroxylamine of the present invention comprises a reaction step of reacting a salt of hydroxylamine with an alkali compound to obtain a hydroxylamine while keeping the reaction solution at a pH of 7 or more, a purification step of purifying the hydroxylamine by ion exchange, and a concentration step of concentrating the hydroxylamine by distillation at the column bottom.
摘要:
An improved ion exchange process for purifying and/or concentrating hydroxylamine from an aqueous solution comprising hydroxylammonium ion and counter anions wherein ion exchange process conditions including effluent pH, effluent conductivity, and ion exchange bed height can be monitored and used to identify when to switch from an ion exchange step feed to a water wash feed, and to switch from a desorbent step to a water rinse step.
摘要:
The present invention is a composition and cleaning method for use in semiconductor processes wherein the compositions comprises at least one amidoxime compound.
摘要:
Le procédé de fabrication de solutions aqueuses d'hydroxylamine base se caractérise en ce qu’on prépare du phosphate d'hydroxylammonium à partir de sulfate d'hydroxylammonium commercial, puis qu'on soumet une suspension dans l'eau de ce phosphate à un traitement thermique par injection simultanée d'azote et de vapeur vive à une température de 130-135°C.
摘要:
Verfahren zur Herstellung einer salzfreien, wässrigen Hydroxylaminlösung durch Umsetzung einer wäßrigen Lösung eines Hydroxylammoniumsalzes mit einer Base unter Erhalt einer Mischung und destillativer Abtrennung einer salzfreien, wässrigen Hydroxylaminlösung aus dieser Mischung, dadurch gekennzeichnet, daß man als Base eine wäßrige Lösung eines Gemischs aus NaOH und KOH im molaren Verhältnis von Na+ : K+ im Bereich von 70 : 30 bis 95 : 5 und einer Gesamtkonzentration aus Na+ und K+ im Bereich von 0,1 bis 10 m/m% bezogen auf die Gesamtmenge des Gemischs einsetzt.
摘要:
An improved ion exchange process for manufacturing and concentrating hydroxylamine from an aqueous solution comprising hydroxylammonium ion and counter anions is disclosed. The process involves the use of an aqueous hydroxylamine wash step which assists in controlling the processing temperature and leads to a more concentrated, purified aqueous hydroxylamine solution.
摘要:
The invention relates to a method for producing an aqueous solution of free hydroxylamine by treating a hydroxylammonium salt with ammonia in the counter-current in a stripping column. As a result, hydroxylamine is released and at the same time, the solution obtained is separated into an aqueous hydroxylamine solution and a salt fraction by distillation. The inventive method is simple and mild, and can be carried out on a large scale. The risk of decomposition is minimal due to the low thermal burden, the low concentration of hydroxylamine and the short residence time involved in the process.
摘要:
A process is disclosed for producing an aqueous solution of free hydroxylamine. A solution obtained by treating an hydroxylammonium salt with a base is treated with water or water vapour at a temperature >/= 80 DEG C, so as to separate the solution into an aqueous hydroxylamine fraction and a salt fraction. This process is soft and easy to implement on a large scale. The risk of decomposition is minimised because of the low thermal stresses, the low hydroxylamine concentration and the short dwelling time during implementation of the process.
摘要:
The present invention concerns a method for making energetic oxidizer salts and solutions thereof, and in particular relates to processes for making aqueous solutions of hydroxylammonium nitrate in high purity suitable for use in making liquid gun propellants. The present alcohol-free process yields high purity alcohol-free hydroxylammonium nitrate by neutralizing an aqueous nitric acid solution (20-70 % wt./wt.) with an alcohol-free aqueous hydroxylamine solution at temeperatures ranging from above -50 C to above ambient to produce the desired alcohol-free aqueous hydroxylammonium nitrate solution in a usable concentration and in high purity. The process is economical, environmentally acceptable, and facile.