公开(公告)号：WO1998010893A1

公开(公告)日：1998-03-19

申请号：PCT/US1997016016

申请日：1997-09-10

Applicant: FSI INTERNATIONAL, INC. ,  INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： FSI INTERNATIONAL, INC. ,  INTERNATIONAL BUSINESS MACHINES CORPORATION ,  NARAYANSWAMI, Natraj ,  WAGENER, Thomas, J. ,  SIEFERING, Kevin, L. ,  CAVALIERE, William, A.

IPC: B24C03/32

CPC classification number: H01L21/67028 ,  B08B15/023 ,  B24C1/003 ,  B24C3/322 ,  B24C9/003

Abstract: An aerosol cleaning apparatus (10) and a method of treating a substrate within such an apparatus prevent contaminant recirculation by controlling the post impingement exhaust flow through control of the aerodynamic behavior of the contaminant laden exhaust stream. By the present invention, the post-impingement exhaust flow is divided into two streams (A, B). A first stream (A) is the main stream flowing initially over the contaminated side of the wafer (12) and carrying most of the suspended contaminants (4) into the exhaust. The second stream (B) flows initially over the cleaned side of the wafer (12) and eventually into the exhaust stream. A flow separator (34) is provided for dividing the post-impingement aerosol spray into plural flow streams (A, B). Additionally, the aerosol chamber (16) can advantageously include a shroud (36) positioned within the aerosol chamber (16) just to the side of the nozzle (18) but further away from the exhaust (20) than the nozzle (18) for restricting flow from the second post-impingement stream around the nozzle and into the first post-impingement stream. In accordance with a preferred embodiment, the apparatus is designed for cleaning the surface of a semiconductor wafer (12) by impinging the surface with a cryogenic aerosol spray.

Abstract translation: 气溶胶清洁装置（10）和处理这种装置内的基板的方法通过控制负载污染物排气流的空气动力学行为来控制后冲击排气流来防止污染物再循环。 通过本发明，后冲击排气流被分成两股流（A，B）。 第一流（A）是最初流过晶片（12）的污染侧的主流，并将大部分悬浮的污染物（4）运送到排气中。 第二流（B）最初流过晶片（12）的清洁侧并且最终流入排气流中。 提供流动分离器（34），用于将后冲击气溶胶喷雾分成多个流动流（A，B）。 另外，气溶胶室（16）可以有利地包括位于喷雾室（16）内的护罩（36），其刚好在喷嘴（18）的侧面，但远离排气（20）而不是喷嘴（18），用于 限制从喷嘴周围的第二后冲击流流入第一后冲击流。 根据优选实施例，该设备被设计用于通过用低温气溶胶喷雾冲击该表面来清洁半导体晶片（12）的表面。

公开(公告)号：WO1994020263A1

公开(公告)日：1994-09-15

申请号：PCT/SE1994000165

申请日：1994-03-01

Applicant: WP-SYSTEM AKTIEBOLAG ,  LINDQUIST, Jan ,  WIBERG, Gösta

Inventor： WP-SYSTEM AKTIEBOLAG

IPC: B24C03/32

CPC classification number: B24C3/325

Abstract: A blast-cleaning system includes an air compressor, a pressure vessel which pressurizes a blasting material and mixes it with compressed air, and a blasting unit connected to an outlet of the pressure vessel for blasting the interior surface of a structure to be cleaned. A conduit arrangement in the blasting apparatus is divided into two branches downstream from a main air valve. One branch opens into an upper portion of the pressure vessel to pressurize the blasting material; the other branch is connected to a mixing valve for mixing the blasting material with compressed air. Valves arranged in the conduit branches are individually set and maintain a constant pressure difference between the compressed air used for pressurization and the compressed air used for mixing, independent of the level of the operating pressure of the main compressed air from the main air valve. The pressure for pressurizing the blasting material is set higher than the mixing pressure. The blasting unit is provided with rotating, preferably belt-driven blast arms with nozzle outlets through which the surface is blasted at an angle. The blasting unit may be supported within the structure to be cleaned either with adjustable wheels or by a brush arrangement. A vacuum and filtering device may also be connected to the duct so that the pressure vessel, blasting unit, duct and filtering device form a substantially closed system.

Abstract translation: 喷射清洁系统包括空气压缩机，对喷射材料加压并与压缩空气混合的压力容器，以及连接到压力容器出口的喷砂单元，用于喷射待清洁结构的内表面。 爆破装置中的导管装置被分为主空气阀下游的两个分支。 一个分支通向压力容器的上部，以对喷砂材料加压; 另一个分支连接到用于将喷射材料与压缩空气混合的混合阀。 设置在导管分支中的阀独立地设置，并且在用于加压的压缩空气与用于混合的压缩空气之间保持恒定的压力差，而与主空气阀的主要压缩空气的操作压力水平无关。 将喷射材料加压的压力设定为高于混合压力。 爆破装置设置有旋转的，优选带驱动的带有喷嘴出口的鼓臂，表面以一定的角度被喷射出去。 喷砂单元可以被支撑在要被清洁的结构中，或者用可调节的轮子或通过刷子布置。 真空和过滤装置也可以连接到管道，使得压力容器，喷砂装置，管道和过滤装置形成基本封闭的系统。

公开(公告)号：WO1991006397A1

公开(公告)日：1991-05-16

申请号：PCT/JP1990001390

申请日：1990-10-30

Applicant: SONY CORPORATION ,  KURODA, Masayuki ,  MISHIMA, Akio ,  KOJIMA, Naoto

Inventor： SONY CORPORATION

IPC: B24C03/32

CPC classification number: B24C1/04 ,  B24C3/322 ,  B24C5/04 ,  G11B5/10 ,  G11B5/6005

Abstract: A method of machining a slider (16) for a magnetic head used in a hard disk or a floppy disk in which a groove (11) and a recess can be formed in an arbitrary shape by using a masking material (14) and jetting fine abrasive grains carried by a carrier gas against the slider (16), and the edges of the surface of the slider (16) are rounded when necessary by blending-machining with the fine abrasive grains.

公开(公告)号：WO1989000481A1

公开(公告)日：1989-01-26

申请号：PCT/EP1988000586

申请日：1988-07-02

Applicant: INTERTECHNO AG

Inventor： INTERTECHNO AG ,  NÄF, Werner

IPC: B24C03/32

CPC classification number: B05D7/222 ,  B05D1/02 ,  B05D3/12 ,  B24C1/086 ,  B24C3/327 ,  F16L58/1009

Abstract: The novel method for the repair of the inside of installed conduits comprises the following method steps: drying of the inside of the line by flow-through of pre-dried compressed air, removal of interior coatings by flow-through of a mixture of compressed air and particles of an abrasive medium with a mean exterior diameter of > 0.8 mm and a specific weight of > 3.0 g.cm in an amount of > 1.0 g.Nm , the mixture flowing through the line with a mean speed of > 10 m.s , relative to normal pressure, and blowing out the line by means of pre-dried compressed air. The adhesive resin utilized for the subsequent coating contains, among others, a solvent-free 2-component resin and at least 5 % by weight of finely dispersed inorganic oxidic adhesives.

Abstract translation: 用于修复已安装导管内部的新颖方法包括以下方法步骤：通过预干燥的压缩空气的流过来干燥管线的内部，通过压缩空气的混合物的流过来去除内部涂层 和平均外径> 0.8mm，比重> 3.0g·cm -3的研磨介质的颗粒的量> 1.0g.Nm -3，混合物流过管线与 平均速度> 10 ms -1，相对于常压，并通过预干燥的压缩空气吹出管线。 用于后续涂料的粘合剂树脂尤其包含无溶剂的2-组分树脂和至少5重量％的细分散的无机氧化粘合剂。

公开(公告)号：WO1996039277A2

公开(公告)日：1996-12-12

申请号：PCT/EP1996002286

申请日：1996-05-28

Applicant: KIPP, Jens, Werner

IPC: B24C03/32

CPC classification number: E03F9/00 ,  A62C27/00 ,  B08B9/0433 ,  B08B9/049 ,  B24C1/003 ,  B24C3/325

Abstract: A method is proposed for removing explosives deposits in effluent pipes or for dissolving explosive from ammunitions casings. The explosive is removed from the wall of the pipe or casing with the aid of a gaseous jet medium to which preferably dry ice is added as an abrasive. A robot (10) is used for operations in pipes. The robot carries an air lance (26) for delivering the jet medium and a television camera (34). The air lance (26) and camera can be rotated by remote control about the pipe axis and can pivot about a transverse axis (52).

Abstract translation: 一种用于在污水管道除去炸药存款或用于从弹药弹炸药，其特征在于，与气态喷砂介质，其优选加入干冰作为爆炸剂的辅助炸药，从管或套筒的壁分离的提取方法。 在下水道管的操作，机器人（10）用于携带用于排出喷砂介质和电视摄像机（34）的空气喷枪（26）。 空气喷枪（26）和照相机都在管轴线和绕横向轴线（52）枢转地安装控制远程旋转。

公开(公告)号：WO1996006710A1

公开(公告)日：1996-03-07

申请号：PCT/DE1995001152

申请日：1995-08-29

Applicant: GEVI GESELLSCHAFT FÜR ENTWICKLUNG UND VERTRIEB INDUSTRIELLER, ZERSTÖRUNGSFREIER UND UMWELTFREUNDLICHER VERFAHRENSTECHNIKEN ZUR INNENSANIERUNG VON ROHRLEITUNGEN MBH ,  REIMELT, Andreas

Inventor： GEVI GESELLSCHAFT FÜR ENTWICKLUNG UND VERTRIEB INDUSTRIELLER, ZERSTÖRUNGSFREIER UND UMWELTFREUNDLICHER VERFAHRENSTECHNIKEN ZUR INNENSANIERUNG VON ROHRLEITUNGEN MBH

IPC: B24C03/32

CPC classification number: F16L55/164 ,  Y10T29/49746

Abstract: A process for renovating pipes in which internal deposits in the pipe are removed by flowing abrasive agents and the pipe is coated internally with a viscous, curing material is performed to obtain a conveyance quality comparable to that of new pipes using simple technical means and the prevention of blockages by removed internal deposits during treatment in such a way that the abrasive agent is conveyed to and fro by means of an alternating pressure drop in the pipe and finally out of the pipe by means of a pressure drop between the two ends of the pipe.

Abstract translation: 由流磨料在管道被移除并且涂覆在与粘性，可固化的涂层材料的内部，一种用于管道的修复方法，与内部沉积物，是实现与简单的技术手段新管道线路质量相当，并防止处理期间通过拆下内部沉积物堵塞 进行，使得所述磨料并最终输送由于从管道出管道的两个端部之间的压力梯度由于在内部管道中的压力下降时，由于在管的交变压力降来回。

公开(公告)号：WO1995005922A1

公开(公告)日：1995-03-02

申请号：PCT/GB1994001763

申请日：1994-08-11

Applicant: HIGHWAY SAFETY SYSTEMS LIMITED ,  LEE, Gary, Francis

Inventor： HIGHWAY SAFETY SYSTEMS LIMITED

IPC: B24C03/32

CPC classification number: E01H1/005 ,  B24C3/06 ,  B24C3/32

Abstract: An apparatus for shot balsting corrosion from roadside barriers (1). Abrasive is projected onto the barrier (1) from a head assembly supported on a vehicle. The head assembly is moved relative to the vehicle to maintain a predetermined position relative to the barrier, and defines a chamber with the barrier (1) within which the abrasive is projected. Projected abrasive is collected from the head assembly and sucked back to the vehicle, cleaned to remove debris dislodged from the barrier (1), and returned to a vehicle-mounted hopper for re-use in the head assembly. The abrasive is projected from an array of nozzles (7, 8, 9, 10).

Abstract translation: 一种用于从路边障碍物（1）喷射平坦化腐蚀的装置。 研磨剂从支撑在车辆上的头部组件投影到挡板（1）上。 头组件相对于车辆移动以保持相对于屏障的预定位置，并且限定具有其中投影磨料的阻挡层（1）的腔室。 投射磨料从头部组件收集并吸回车辆，清洁以除去从障碍物（1）移出的碎屑，并返回到车载式料斗，以便在头部组件中重复使用。 研磨剂从喷嘴阵列（7,8,9,10）突出。