-
1.发明申请
公开(公告)号：WO2018151655A1
公开(公告)日：2018-08-23
申请号：PCT/SE2018/050144
申请日：2018-02-14
Applicant: CLEANERGY AB
Inventor： HERTIN, Andreas , WEBER, Peter
CPC classification number: F24S25/60 , F16B21/071 , F24S23/71 , F24S23/82 , F24S2025/016 , F24S2025/6006 , G02B7/183 , G02B7/192 , Y02E10/42 , Y02E10/47
Abstract: An arrangement of fasteners (220) for securing a mirror (111) of a parabolic solar reflector (110) to a support (120) of said parabolic solar reflector (110) is provided. The arrangement of fasteners (220) comprise a first, second and third fastener (220a, 220b, 220c) arranged on the back (112) of said mirror (111) in a triangular formation. Each of the first, second and third fastener (220a, 220b, 220c) comprises a mounting plate (230) and a collar (240) having an aperture (310) arranged to receive a fastening element (210) in order to connect the mirror (111) to the support (120). The mounting plate (230a) of the first fastener (220a) is configured such that the collar (241a) is laterally movable in all directions with respect to the mounting plate (230a). The mounting plate (230b) of the second fastener (220b) is configured such that the collar (240b) is laterally fixed with respect to the mounting plate (230b). The mounting plate (230c) of the third fastener (220c) is configured such that the collar (240c) is laterally movable along a single line of direction (510) with respect to the mounting plate (230c). Furthermore, a mirror comprising an arrangement of fasteners (220) and a parabolic solar reflector (100) are also provided.
-
公开(公告)号：WO2015163026A1
公开(公告)日：2015-10-29
申请号：PCT/JP2015/057006
申请日：2015-03-10
Applicant: 株式会社日立製作所
Inventor： 石田 進
Abstract: 接着剤の硬化後に発生するミラーの位置ずれを低減する技術を提供することを目的とする。 支持部材である筐体１と、筐体１に固定される光学部材である反射ミラー３と、を有し、反射ミラー３は、中間材２を挟んで第一の接着剤６と、第二の接着剤８と、が配された接着層によって、筐体１に固定されている。
Abstract translation: 本发明的目的是提供一种能够降低粘合剂固化后由反射镜发生位置偏移的技术。 该部件具有用作支撑构件的底盘（1）和用作固定到底架（1）的光学部件的反射镜（3）。 反射镜（3）通过夹着中间材料（2）的第一粘合剂（6）和第二粘合剂（8）的粘合剂层固定到底架（1）上。
-
公开(公告)号：WO2004061767A3
公开(公告)日：2005-09-29
申请号：PCT/US0341769
申请日：2003-12-30
Applicant: FOSTER MILLER INC
Inventor： WARREN PETER A
CPC classification number: G02B7/183 , Y10S359/90
Abstract: An open lattice mirror structure with an optical face sheet (22), a supporting isogrid framework (26) supporting the optical face sheet, an isogrid back plane (28), and a truss core (30) interconnecting the supporting isogrid framework and the isogrid back plane for transferring shear loads evenly between the face sheet and the isogrid back plane.
Abstract translation: 具有光学面片（22）的开放式格子镜结构，支撑光学面片的支撑等角线框架（26），等电网背面（28）和将支撑等电网框架与等电网相互连接的桁架芯（30） 用于将剪切载荷均匀地转移到面板和等离子体背面之间的背面。
-
公开(公告)号：WO2022093426A1
公开(公告)日：2022-05-05
申请号：PCT/US2021/050915
申请日：2021-09-17
Applicant: RAYTHEON COMPANY
Inventor： COX, Christopher A.
Abstract: A method includes rotating (902) a mirror assembly (600) in a first direction using an actuator (110). The mirror assembly is rotationally coupled to a base (126) and includes a mirror (102), A first end of the mirror is rotationally coupled to the base, and a second end of the mirror is not supported by or attached to another structure. The method also includes rotating (904) a reaction inertia assembly (700) in a second direction opposite the first direction using the actuator. The reaction inertia assembly is rotationally coupled to the base. The method further includes restricting (906) movement of the mirror assembly and the reaction inertia assembly in multiple degrees of freedom using multiple flexures (131, 132, 133, 134).
-
5.发明申请
公开(公告)号：WO2009016658A1
公开(公告)日：2009-02-05
申请号：PCT/IT2007/000537
申请日：2007-07-27
Applicant: GALILEO AVIONICA S.p.A. , LAGANA' Paolo , CHICARELLA, Leonardo , FELICI, Maurizio
Inventor： LAGANA' Paolo , CHICARELLA, Leonardo , FELICI, Maurizio
CPC classification number: G02B5/0808
Abstract: A method for the production of mirrors (4) comprising a preliminary controlled pre-deformation treatment of an optical system (1) consisting of the following phases of: calculation of the deformation of the optical system (1) due to a selected reflecting treatment (2); design of a deforming layer (3) such as to produce on the optical system (1) a deformation opposite to the one caused by the selected reflecting treatment (2); and deposition on the optical system (1) of a deforming layer (3), on which the selected reflecting treatment (2) will subsequently be deposited.
Abstract translation: 一种用于生产反射镜（4）的方法，包括由以下阶段组成的光学系统（1）的预控制的预变形处理：由于所选择的反射处理计算光学系统（1）的变形（ 2）; 变形层（3）的设计，例如在光学系统（1）上产生与由所选择的反射处理（2）引起的变形相反的变形; 以及沉积在变形层（3）的光学系统（1）上，随后将沉积所选择的反射处理（2）。
-
Patent Agency Ranking
公开(公告)号：WO00019260A1
公开(公告)日：2000-04-06
申请号：PCT/US1999/021670
申请日：1999-09-20
CPC classification number: G02B7/00 , G02B1/10 , G02B7/008 , G03F7/70825
Abstract: A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates with reduced sensitivity to mechanical mounts.
Abstract translation: 同时提供高基板动态刚度的基座光学基板，为机械安装硬件输入提供低的表面图灵敏度，并且将由光学涂层引起的表面图形变化限制为主要是球形的。 基座光学基板包括具有被涂覆的顶表面的盘状光学元件或基板部分，提供可安装基板的位置的盘状基部部分和基部与光学元件或基板之间的连接圆柱形部分 部分。 连接圆柱形部分可以通过三个间隔开的腿或构件附接。 然而，基座光学基板可以由固体材料制成以形成整料，从而避免了两部分之间的接合，或者可以单独地形成盘状基底并连接到连接部分。 作为示例，基座光学基板可以用于制造用于极紫外（EUV）光刻成像系统的光学器件，或者可用于需要涂覆的光学器件和对机械安装件的灵敏度降低的基板的任何光学系统中。
-
公开(公告)号：WO2020023498A1
公开(公告)日：2020-01-30
申请号：PCT/US2019/043012
申请日：2019-07-23
Applicant: THORLABS, INC.
Inventor： D'ALESSIO, Brett
Abstract: An optomechanical device having an interface that is mounted to another interface wherein the two interfaces are made of materials having the same or similar coefficients of thermal expansion and within the optomechanical device is an interface that is designed to compensate for the second mechanical component that is made of materials having the same or similar coefficients of thermal expansion as the optic or photonic device or instrument being held or controlled altogether with a fully constrained set of slip planes making for an optical mechanical device consisting of two or more materials that have coefficients of thermal expansion that are suitably matched to the materials it is being mounted to and the materials it is holding or controlling.
-
公开(公告)号：WO02042823A1
公开(公告)日：2002-05-30
申请号：PCT/US2001/043220
申请日：2001-11-19
CPC classification number: G02B26/0833
Abstract: A strain-isolated mirror (20) is made from a ZERODUR (TM) substrate having body portions (34, 38). Connecting portions extend across a gap between the body portions with flexural hinges (48, 50, 52). In the fabrication of an integrated circuit for steps during which a wafer rests on a movable stage (10) with strain isolated mirrors (20, 21) of interferometers (18, 19) under a projector.
Abstract translation: 应变隔离镜（20）由具有主体部分（34,38）的ZERODUR TM衬底制成。 连接部分在弯曲铰链（48,50,52）之间穿过主体部分之间的间隙延伸。 在用于步骤的集成电路的制造中，在该步骤中，晶片在投影仪下放置在具有应变隔离镜（20,21）的可移动台（10）上的干涉仪（18,19）上。
-
公开(公告)号：WO00019259A1
公开(公告)日：2000-04-06
申请号：PCT/US1999/018576
申请日：1999-08-16
CPC classification number: G02B7/00 , G02B1/10 , G02B7/008 , G03F7/70825
Abstract: A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The optic section has an optical section thickness /optical section diameter ratio of between about 5 to 10 mm, and a thickness variation between front and back surfaces of less than about 10 %. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates with reduced sensitivity to mechanical mounts.
Abstract translation: 同时提供高基板动态刚度的基座光学基板，为机械安装硬件输入提供低的表面图灵敏度，并且将由光学涂层引起的表面图形变化限制为主要是球形的。 基座光学基板包括具有被涂覆的顶表面的盘状光学元件或基板部分，提供可安装基板的位置的盘状基部部分和基部与光学元件或基板之间的连接圆柱形部分 部分。 光学部分的光学部分厚度<2 /光学截面直径比在约5至10mm之间，前表面和背面之间的厚度变化小于约10％。 连接圆柱形部分可以通过三个间隔开的腿或构件附接。 然而，基座光学基板可以由固体材料制成以形成整料，从而避免了两部分之间的接合，或者可以单独地形成盘状基底并连接到连接部分。 作为示例，基座光学基板可以用于制造用于极紫外（EUV）光刻成像系统的光学器件，或者可用于需要涂覆的光学器件和对机械安装件的灵敏度降低的基板的任何光学系统中。
-
公开(公告)号：WO2023026772A1
公开(公告)日：2023-03-02
申请号：PCT/JP2022/029340
申请日：2022-07-29
Applicant: 三菱電機株式会社
IPC: H01S5/02253 , G02B7/00 , G02B7/192 , G02B7/195 , H01S5/02255 , H01S5/0239 , H01S5/024
Abstract: 光モジュール（１Ａ）は、複数の発光点を有するマルチエミッタ半導体レーザバー（２）が出力する複数のビームを平行にするコリメートレンズアレイ（４）を有するレンズユニット（５）と、レンズユニット（５）よりもビームの伝搬方向の前方に配置される光学素子（４１ａ，・・・，４１ｎ）を有する素子ユニット（５１ａ，・・・，５１ｎ）と、を備え、素子ユニット（５１ａ，・・・，５１ｎ）の各々は、光学素子（４１ａ，・・・，４１ｎ）を保持する保持部材（６ａ，・・・，６ｎ）を更に有する。コリメートレンズアレイ（４）の反りの向き、及び光学素子（４１ａ，・・・，４１ｎ）の反りの向きは、複数の発光点を結ぶ線の反りの向きと同じであり、保持部材（６ａ，・・・，６ｎ）の各々は、第３の接合部材（１１ａ，・・・，１１ｎ）によって伝搬方向に接合されている。
-
-
-
-
-
-
-
-
-
Search Results
14
records
(took 0.008 seconds)
