公开(公告)号：WO2021194702A1

公开(公告)日：2021-09-30

申请号：PCT/US2021/020554

申请日：2021-03-02

Applicant: APPLIED MATERIALS, INC.

Inventor： SUBRAMANI, Anantha, K. ,  KOTRAPPA, Arun, Kumar ,  KUMAR, Hanish, Panavalappil Kumarankutty ,  SUNDAR, Ramcharan

IPC: H01J37/32 ,  H01J2237/20235 ,  H01J37/32082 ,  H01J37/32513 ,  H01J37/32715

Abstract: Embodiments disclosed herein include an RF return assembly. In an embodiment, the RF return assembly comprises a first plate with a flange, where a first hole and a second hole pass through the flange. The RF return assembly may further comprise a second plate over the first plate, and a first body positioned above the flange. In an embodiment, the RF return assembly further comprises a second body positioned below the flange, where the first body is affixed to the second body by a pillar that passes through the first hole. In an embodiment, the RF return assembly further comprises a spring attached between the second plate and the second body, where the spring passes through the second hole, and a conductive band to electrically couple the first body to the flange.

公开(公告)号：WO2022238621A1

公开(公告)日：2022-11-17

申请号：PCT/FI2022/050314

申请日：2022-05-10

Applicant: PICOSUN OY

Inventor： KILPI, Väinö

IPC: H01J37/32 ,  C23C16/455 ,  C23C16/4409 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/4583 ,  C23C16/4586 ,  C23C16/511 ,  H01J2237/20235 ,  H01J2237/332 ,  H01J2237/334 ,  H01J37/3222 ,  H01J37/32577 ,  H01J37/32715 ,  H01J37/32816 ,  H01J37/32834 ,  H01J37/3288 ,  H01J37/32899 ,  H01L21/67069 ,  H01L21/68742 ,  H01L21/68785

Abstract: A substrate processing apparatus (100), comprising a reaction chamber (50), an outer chamber (80) at least partly surrounding the reaction chamber (50) and forming an intermediate volume (70) therebetween, and a substrate support (40) within the reaction chamber (50), comprising a hollow inner volume (42), wherein the hollow inner volume (42) and the intermediate volume (70) are in fluid communication through a channel (45) extending from the hollow inner volume (42) to the intermediate volume (70).