DETECTION AIDED TWO-STAGE PHASE UNWRAPPING ON PATTERN WAFER GEOMETRY MEASUREMENT

    公开(公告)号:WO2022256466A1

    公开(公告)日:2022-12-08

    申请号:PCT/US2022/031859

    申请日:2022-06-02

    Abstract: Systems and methods for unwrapping a phase map are disclosed. Such systems and methods may include receiving a wrapped phase map associated with an interferometric measurement of a sample including patterned features; removing a tilt from the wrapped phase map; generating a background; detecting features in the wrapped phase, the features in the wrapped phase map corresponding to least some of the patterned features of the sample; replacing phases of the features with the background at corresponding locations in the wrapped phase map; unwrapping the modified wrapped phase map using a global phase-unwrapping; applying local phase-unwrapping to restore the phases of the features; and reapplying the tilt to generate an output unwrapped phase map.

    RAMSEY-BORDÉ ION FREQUENCY-REFERENCE APPARATUS, AND METHODS OF MAKING AND USING THE SAME

    公开(公告)号:WO2022191921A1

    公开(公告)日:2022-09-15

    申请号:PCT/US2022/012632

    申请日:2022-01-15

    Abstract: In some variations, an interferometric frequency-reference apparatus comprises: an atom source configured to supply neutral atoms to be ionized; an ionizer configured to excite the neutral atoms to form ionized atoms; an ion collimator configured to form a collimated beam of the ionized atoms; probe lasers; and a Doppler laser configured to determine a ground-state population of the ionized atoms, wherein the atom source, the ionizer, and the ion collimator are disposed within a vacuum chamber. Other variations provide a method of creating a stable frequency reference, comprising: forming ionized atoms from an atomic vapor; forming a collimated beam of ionized atoms; illuminating ionized atoms with first and second probe lasers; adjusting the frequencies of the first probe and second probe lasers using Ramsey spectroscopy to an S → D transition of ionized atoms; and determining a ground-state population of the ionized atoms with another laser.

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