A substrate reverse moving device is composed of a reversing mechanism and a moving mechanism. A rotating mechanism incorporates a motor or the like, and is capable of rotating a first movable member and a second movable member to which first and second supporting members that support a substrate therebetween are fixed, respectively, around a horizontal axis through, for example, 180 degrees via a link mechanism. Moreover, a pair of transport rails is fixed on a base in parallel to V direction. A pair of sliding blocks is slidably attached to the pair of transport rails. A floorboard of the reversing mechanism is attached to the sliding blocks. A direct acting mechanism moves a driver in a direction parallel to the transport rails, so that the reversing mechanism moves back and forth in the V direction along the transport rails.