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发明授权
CN101409247B 基材支撑单元以及使用该基材支撑单元处理基材的设备 失效 - 权利终止

基材支撑单元以及使用该基材支撑单元处理基材的设备
摘要：
本发明提供一种基材支撑单元以及使用该基材支撑单元的基材处理设备。该基材支撑单元包括基板和在该基板上形成的支撑部。该支撑部包括两个彼此相对的侧壁和连接两个侧壁的主体。在该主体内形成有与该基材接触的多个狭槽，该狭槽向垂直于第一方向的第二方向倾斜。
摘要（英）：

The present invention provides a substrate support unit and a substrate processing arrangement using the substrate support unit. The substrate support unit includes a substrate and a support section formed on the substrate. The support section includes two support levers and a plurality of support members. The two support levers extends in the predetermined direction, in a mode of mutually separated with each other. The plurality of support members are arranged in the predetermined direction, in a mode of mutually separated with each other. All the support members are connected to the supportlever.

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