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CN101595240B 磁控管单元、磁控管溅射设备和制造电子器件的方法 有权

磁控管单元、磁控管溅射设备和制造电子器件的方法
摘要：
一种磁控管单元包括：多个第一磁体元件，每个第一磁体元件都包括具有相同极性且设置在由磁性材料制成的轭板的两端部分上的第一磁体、以及具有与第一磁体的极性不同的极性且布置在轭板的中间部分上的第二磁体；基板，在所述基板上设置有运动装置以使所述多个第一磁体元件中的每个沿一个方向运动；以及第二磁体元件，其包括由磁性材料制成且分别固定至基板的两端部分的轭板、具有与第二磁体的极性相同的极性且布置在轭板上的磁体、以及具有与第一磁体的极性相同的极性且设置在所述磁体上的磁体。
摘要（英）：

A magnetron unit includes a plurality of first magnet elements each including first magnets which have the same polarity and are provided on two end portions of a yoke plate made of a magnetic material and a second magnet which has a polarity different from that of the first magnets and is provided on a middle portion of the yoke plate, a base plate on which a moving unit is placed to make each of the plurality of first magnet elements move in one direction, and a second magnet element which includes yoke plates made of a magnetic material and fixed to two end portions respectively, of the base plate, a magnet which has the same polarity as that of the second magnet and is placed on the yoke plate and a magnet which has the same polarity as that of the first magnet and is placed on the magnet.

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