利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN101785369A 用于产生极紫外辐射的模块和方法 无效 - 驳回 复审申请

用于产生极紫外辐射的模块和方法
摘要：
一种用于产生极紫外辐射的模块(1)包括：供给装置，该供给装置被配置以将点燃材料的液滴供给到预定目标点燃位置上；激光器(6)，该激光器被布置以聚焦到该预定目标点燃位置上并通过撞击位于预定目标点燃位置处的这样的液滴(4)来产生等离子体，以便将液滴变成用于产生极紫外辐射的等离子体。另外，模块包括收集反射镜(12)，该收集反射镜具有反射镜表面(14)，该反射镜表面被构造和布置以反射辐射，以便将辐射聚焦到焦点(FP)上。流体供给装置(2)被构造和布置以在横向于反射镜表面的方向上形成远离反射镜表面流动的气流(GF)，以便减缓由等离子体产生的颗粒碎片。
摘要（英）：

A module (1) for producing extreme ultraviolet radiation includes a supply configured to supply droplets of an ignition material to a predetermined target ignition position and a laser (6) arranged to be focused on the predetermined target ignition position and to produce a plasma by hitting such a droplet (4) which is located at the predetermined target ignition position in order to change the droplet into an extreme ultraviolet producing plasma. Also, the module includes a collector mirror (12) having a mirror surface (14) constructed and arranged to reflect the radiation in order to focus the radiation on a focal point (FP). A fluid supply (2) is constructed and arranged to form a gas flow (GF) flowing away from the mirror surface in a direction transverse with respect to the mirror surface in order to mitigate particle debris produced by the plasma.

0/0