The invention provides a tile type power electrode of a large-area VHF-PECVD reaction chamber capable of obtaining a uniform electric field. The power electrode comprises a power electrode plate and a power feed-in connecting port, and is characterized in that: the plate surface of the power electrode plate is a single-sided or double-sided concave arc-shaped curved surface; the axial direction of the arc-shaped curved surface is parallel with the power feed-in connecting port; and the power feed-in connecting port consists of even points symmetrically arranged on the end face of the power electrode plate. The tile type power electrode for the large-area VHF-PECVD reaction chamber capable of obtaining the uniform electric field corrects inter-electrode standing wave effect on the distribution uniformity of the electric field by using a tile type arc-shaped curved surface which is over against a substrate S and improves the distribution uniformity of the electric field. The tile type power electrode solves the problem of the distribution uniformity of inter-electrode electric fields of the large-area VHF-PECVD reaction chamber, lays a foundation for the research and development of a system for depositing and etching a large-area VHF-PECVD film and forcefully promotes the industrialization process of silicon film battery and film transistor matrix technology.