利索-全球专利检索

  1. 登录
  2. 注册
发明授权
CN101901748B 基板处理装置和基板处理方法 有权

基板处理装置和基板处理方法
摘要：
本发明提供一种基板处理装置、基板处理方法和存储介质。该基板处理装置具有将基板从载体搬送到处理块的搬送机构，能够抑制上述搬送机构的搬送工序数的上升并且提高处理能力。在能够向用于将基板搬入到处理块中的第一交接模块搬送基板时，不经由缓冲模块地以上述搬送顺序从载体向第一交接模块搬送基板，在不能从上述载体向该第一交接模块搬送基板时，以与上述搬送顺序相反的顺序从载体向缓冲模块搬送基板，对搬送机构的动作进行控制，使得在以先于已搬送到上述缓冲模块的基板搬送到上述第一交接模块的方式设定的基板全部被搬送到该第一交接模块后，以上述搬送顺序将该已搬送到上述缓冲模块的基板搬送到第一交接模块。
摘要（英）：

The present invention provides a substrate processing apparatus, a substrate processing method and a storage medium. The substrate processing apparatus comprises a conveying mechanism for conveying a substrate from a carrier to a processing block, and is capable of restraining increase of conveying process number of the conveying unit to improve productivity. When the substrate can be conveyed toa first handover module for conveying the substrate to the processing block, the substrate is conveyed to the first handover module from the carrier without use of a buffering module, when the substrate can not be conveyed to the first handover module from the carrier, the substrate is conveyed to the buffering module from the carrier, the conveying mechanism is controlled such that the substrateconveyed to the buffering module is conveyed to the first handover module after all substrates which are prior to that conveyed to the buffering module are conveyed to the first handover module.

公开/授权文献
0/0