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发明公开
CN103086934A 光酸产生剂及包含该光酸产生剂的光刻胶 无效 - 驳回 复审申请

光酸产生剂及包含该光酸产生剂的光刻胶
摘要：
具有式(I)所示结构的光酸产生剂化合物：[A-(CHR1)p]k-(L)-(CH2)m-(C(R2)2)n-SO3-Z+ (I)，其中A是任选地包含O、S、N、F或包含上述至少一种的组合的取代或未取代的单环、多环或稠合多环的C5或者更大的脂环族基团，R1是H、单键、或取代或未取代的C1-30烷基，其中当R1是单键时，R1是以共价键的方式与A的一个碳原子键合，每个R2独立地是H、F、或C1-4氟烷基，其中至少一个R2不是氢，L是包括磺酸盐/酯基团、磺酰胺基团、或C1-30的含有磺酸盐/酯或磺酰胺基团的连接基团，Z是有机或无机阳离子，p是0到10的整数，k是1或2，m是0或更大的整数，n是1或更大的整数。本发明还公开了光酸产生剂的前体化合物、包含所述光酸产生剂的光刻胶组合物，和涂覆有所述光刻胶组合物的基材。
摘要（英）：

A photoacid generator compound has the formula (I): [A-(CHR1)p]k-(L)-(CH2)m-(C(R2)2)n-SO3-Z+ (I) wherein A is a substituted or unsubstituted, monocyclic, polycyclic, or fused polycyclic C5 or greater cycloaliphatic group optionally comprising O, S, N, F, or a combination comprising at least one of the foregoing, R1 is H, a single bond, or a substituted or unsubstituted C1-30 alkyl group, wherein when R1 is a single bond, R1 is covalently bonded to a carbon atom of A, each R2 is independently H, F, or C1-4 fluoroalkyl, wherein at least one R2 is not hydrogen, L is a linking group comprising a sulfonate group, a sulfonamide group, or a C1-30 sulfonate or sulfonamide-containing group, Z is an organic or inorganic cation, p is an integer of 0 to 10, k is 1 or 2, m is an integer of 0 or greater, and n is an integer of 1 or greater. A precursor compound to the photoacid generator, a photoresist composition including the photoacid generator, and a substrate coated with the photoresist composition, are also disclosed.

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