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发明授权
CN105161442B 一种清洗液体收集装置 有权

一种清洗液体收集装置
摘要：
本发明公开了一种清洗液体收集装置，包括进气部分、清洗液体收集部分和气‑液分离部分，通过进气部分向清洗液体收集部分通入气体，在气体出口处形成环形气帘，与晶圆表面甩离的清洗液体发生非弹性碰撞，使清洗液体改变运动方向，进入气液收集空腔，并通过气‑液分离装置分离排出，可减少液体清洗介质在液体收集结构侧壁处的回溅，防止二次污染的发生，并可同时提高液体清洗介质的回收效率。
摘要（英）：

The invention discloses a cleaning liquid collecting device comprising an air inflow portion, a cleaning liquid collecting portion, and an air-liquid separating portion. The air inflow portion supplies air to the cleaning liquid collecting portion. An annular air curtain is formed at an air outlet and achieves inelastic collision with cleaning liquid separated from the surface of a wafer. Thus, the cleaning liquid is changed in moving direction, enters an air-liquid collecting cavity and is separated and exhausted by the air-liquid separating portion. The cleaning liquid collecting device may reduce back-splash of cleaning medium at the sidewall of a cleaning liquid collecting structure, prevents secondary pollution, and improves liquid cleaning medium recovery efficiency.

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