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发明授权
CN105277579B 荧光X射线分析装置 有权

荧光X射线分析装置
摘要：
本发明涉及荧光X射线分析装置。提供一种能够简便地进行与测定通常的样品的情况相同的条件下的校正测定的荧光X射线分析装置。所述荧光X射线分析装置具备：X射线源；用于对将来自该X射线源的X射线作为一次X射线照射到样品的区域进行限制的照射区域限制单元；用于检测从样品产生的二次X射线的检测器；用于对包含X射线源、照射区域限制单元和检测器的装置进行校正的校正用样品；用于在作为保持该校正用样品并且从所述一次X射线的路径偏离的任意的位置的退避位置和照射从照射区域限制单元射出的X射线的一次X射线照射位置这2个位置之间移动的校正样品移动机构；以及载置样品的样品台，校正样品移动机构为与所述样品台独立的机构。
摘要（英）：

An X-ray fluorescence analyzer includes: a measurement device having: an X-ray source that emits an X-ray; an irradiation area restricting member that restricts an area of a measurement sample to be irradiated with the X-ray as a primary X-ray; and a detector that detects a secondary X-ray generated from the measurement sample. The analyzer further includes: a sample stage that holds and moves the measurement sample between a measurement position at which the measurement sample is irradiated with the primary X-ray to detect the secondary X-ray by the detector and a first retracted position at which the measurement sample is retracted from the measurement position; and a calibration sample moving mechanism that holds a calibration sample for calibrating the measurement device and moves the calibration sample between the measurement position and a second retracted position at which the calibration sample is retracted from the measurement position.

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