The invention provides substrate detection equipment and a working method thereof and belongs to the technical field of display. The substrate detection equipment is used for detecting a transferred substrate and comprises multiple detection units and a substrate information collector connected with the multiple detection units, wherein each detection unit comprises a contact part for forming surface contact with the transferred substrate and a processing part for detecting the contact state of the contact part and the transferred substrate, and after at least one of the contact part is in surface contact with the transferred substrate, the substrate information collector receives a detection result of the corresponding processing part and judges whether the substrate is damaged according to the detection result of the processing part. According to the technical scheme, whether the substrate is broken can be detected, and the implementation cost is low.