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发明授权
CN105689330B 一种改善炉管晶舟支撑脚颗粒状况的装置及方法 有权

一种改善炉管晶舟支撑脚颗粒状况的装置及方法
摘要：
本发明公开了一种改善炉管晶舟支撑脚颗粒状况的装置及方法，通过在机械手臂的两侧设置喷嘴，可在利用机械手臂向晶舟传输晶圆的过程中，对晶舟支撑脚的支撑部位进行气体吹扫，达到清洁晶舟支撑脚的目的，从而可改善炉管机台存在的颗粒状况。
摘要（英）：

The invention discloses a device and a method for improving the condition of particles of boat slot pins of a furnace tube. Spray nozzles are arranged at two sides of a mechanical arm, so that in the process that the mechanical arm is used to transmit wafers to the boat, supporting parts of the boat slot pins are purged with gas, the purpose of cleaning the boat slot pins is achieved, and the condition of particles of a furnace tube machine is improved.

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