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发明公开
CN106030775A 使用轮廓剪影图像的自动化在线检验和计量 有权

使用轮廓剪影图像的自动化在线检验和计量
摘要：
本发明揭示轮廓剪影(Shadow‑gram)，其用于堆叠晶片的边缘检验和计量。系统包含：光源，其将准直光引导在所述堆叠晶片的边缘处；检测器，其与所述光源相对；及控制器，其连接到所述检测器。所述堆叠晶片可相对于所述光源旋转。所述控制器分析所述堆叠晶片的所述边缘的轮廓剪影图像。比较所述堆叠晶片在所述轮廓剪影图像中的侧影(silhouette)的测量与预定测量。可汇总并分析沿所述堆叠晶片的所述边缘的不同点处的多个轮廓剪影图像。
摘要（英）：

Shadow-grams are used for edge inspection and metrology of a stacked wafer. The system includes a light source that directs collimated light at an edge of the stacked wafer, a detector opposite the light source, and a controller connected to the detector. The stacked wafer can rotate with respect to the light source. The controller analyzes a shadow-gram image of the edge of the stacked wafer. Measurements of a silhouette of the stacked wafer in the shadow-gram image are compared to predetermined measurements. Multiple shadow-gram images at different points along the edge of the stacked wafer can be aggregated and analyzed.

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