利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN106062921A 智能腔室及智能腔室元件 有权

智能腔室及智能腔室元件
摘要：
处理腔室包括腔室主体、一或多个监控装置，及一或多个天线，腔室主体具有设置于腔室主体上的腔室盖组件，一或多个监控装置与腔室盖组件耦接，一或多个天线邻近于与一或多个监控装置通信的腔室盖组件设置。
摘要（英）：

A process chamber includes a chamber body having a chamber lid assembly disposed thereon, one or more monitoring devices coupled to the chamber lid assembly, and one or more antennas disposed adjacent to the chamber lid assembly that are in communication with the one or more monitoring devices.

公开/授权文献
0/0