The invention provides a heat treatment process method and manufacturing process method for a thin-film resistor and relates to the field of electronic components. The heat treatment process method and manufacturing process method for the thin-film resistor comprise the following steps: heating a thin-film resistor to a first temperature point by utilizing a heat treatment box, and maintaining heating time preset at the first temperature point; cooling the thin-film resistor for preset cooling time by adopting at least one second temperature point after the preset heating time, wherein the preset cooling time comprises cooling time periods of which the number is the same as the quantity of the temperature points, and the at least one second temperature point is sequentially decreased progressively according to a sequence of the cooling time periods. Therefore, the finally produced thin-film resistor has high resistance precision consistency and high yield. Moreover, the over-current resistance, fatigue resistance and high-temperature exposure performance of the thin-film resistor are improved.