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发明公开
CN110192262A 用于电子源的提取器电极 有权

用于电子源的提取器电极
摘要：
提取器及提取器系统最小化与初级电子束相互作用且使所述初级电子束降级的次级电子的产生。这可改进例如扫描电子显微镜的电子束系统的性能。所述提取器可包含随着距所述电子束的源的距离的增加而变宽的截头圆锥形孔隙。到所述截头圆锥形孔隙中的入口还可包含弯曲边缘。
摘要（英）：

Extractors and extractor systems minimize the generation of secondary electrons which interact with and degrade the primary electron beam. This can improve the performance of an electron beam system,such as a scanning electron microscope. The extractor may include a frustoconical aperture that widens as distance from the source of the electron beam increases. The entrance into the frustoconical aperture also can include a curved edge.

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