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发明公开
CN110355019A 利用喷墨头的药液供应方法 有权

利用喷墨头的药液供应方法
摘要：
本发明提供一种药液供应方法，其利用包括中心部分与分别具有第一部分及第二部分的周边部分的喷墨头，可以从中心部分以第一药液供应量将药液供应到基板上，从第一部分以第二药液供应量将药液供应到基板上，从第二部分以第三药液供应量将药液供应到基板上。可以将喷墨头在基板的上部移动相当于周边部分的长度的量。可以从中心部分以第一药液供应量将药液供应到基板上，从第一部分以第二药液供应量将药液供应到基板上，从第二部分以第三药液供应量将药液供应到基板上。本发明的药液供应方法能够有效防止在所述基板的邻接的区域的边界因所述药液而可能发生的界面湍动现象，能够在所述基板上均匀地形成所需的薄膜。
摘要（英）：

The present invention provides a method for ejecting droplet. In the method of supplying chemical liquid using an ink jet head including a central portion and peripheral portions each having a first portion and a second portion, a first chemical liquid supply of a chemical liquid may be provided from the central portion onto a substrate, a second chemical liquid supply of the chemical liquid may be provided from the first portion onto a substrate, and a third chemical liquid supply of the chemical liquid may be provided from the second portion onto a substrate. The ink jet head may be moved over the substrate by a length of the peripheral portion. The first chemical liquid supply of the chemical liquid may be provided from the central portion onto a substrate, the second chemical liquid supply of the chemical liquid may be provided from the first portion onto a substrate, and the third chemical liquid supply of the chemical liquid may be provided from the second portion onto a substrate.

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