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发明公开
CN110412704A 光学装置、曝光装置、光学装置制造方法和物品制造方法 有权

光学装置、曝光装置、光学装置制造方法和物品制造方法
摘要：
本发明涉及光学装置、曝光装置、光学装置制造方法和物品制造方法。一种光学装置包括光学部件、被配置为支撑光学部件的支撑机构、操纵机构，该操纵机构被配置为在接触光学部件的同时操纵光学部件，使得光学部件的状态改变。通过操纵机构将光学部件从光学部件由支撑机构支撑的第一状态改变为光学部件由操纵机构支撑的第二状态。
摘要（英）：

The invention relates to an optical apparatus, an exposure apparatus, a method of manufacturing the optical apparatus, and a method of manufacturing the article. The optical apparatus includes an optical component, a support mechanism configured to support the optical component, a manipulation mechanism configured to manipulate the optical component while contacting the optical component such thata state of the optical component is changed. The optical component is changed by the manipulation mechanism from a first state in which the optical component is supported by the support mechanism toa second state in which the optical component is supported by the manipulation mechanism.

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