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发明公开
CN110647012A 用于测量多层结构的层之间叠对的技术 有权

用于测量多层结构的层之间叠对的技术
摘要：
一种用于确定多层结构的层之间叠对的方法，该方法可包含以下步骤：得到代表多层结构的给定影像、得到用于多层结构的层的预期影像、提供多层结构的结合的预期影像为所述层的预期影像的结合、执行给定影像相对于结合的预期影像的配准、及提供给定影像的分割从而产生分割的影像和所述多层结构的层的图像。所述方法可进一步包含以下步骤：通过一起处理多层结构的任何两个选择的层的图像和所述两个选择的层的预期影像来确定所述两个选择的层之间的叠对。
摘要（英）：

A method for determining overlay between layers of a multilayer structure may include the following steps: obtaining a given image representing the multilayer structure, obtaining expected images forlayers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of the layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of the multilayered structure. The method may further include the following steps: determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of the twoselected layers.

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