The invention discloses a treatment system for particle contamination on the surface of an optical element. The treatment system includes a base plate, an air knife and ion rod unit and an electrostatic adsorption electrode; the base plate is provided with the optical element through a supporting column; the air knife and ion rod unit is connected to the base plate through a support unit, the airknife and ion rod unit is located at one end of the optical element, and an air outlet of the air knife and ion rod unit faces the upper surface of the optical element; and the electrostatic adsorption electrode includes a positive electrode rod and a negative electrode rod which are arranged in parallel, the positive electrode rod and the negative electrode rod are connected to the base plate through electrode supporting frames, the positive electrode rod is located above the optical element, and the negative electrode rod is located below the optical element. By means of the treatment system, an air knife and an ion rod generate iron wind or high-speed airflow to remove pollutants on the surface of the optical element and enable the pollutants to be charged, the electrostatic adsorptionelectrode moves at the tail end of the optical element or is driven to move back and forth on the surface of the optical element to collect the pollutants, and the purpose of pollutant removal is realized.