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CN111129013A 具有不同宽度的源极与漏极触点的半导体装置 无效 - 撤回

具有不同宽度的源极与漏极触点的半导体装置
摘要：
一种具有不同宽度的源极与漏极触点的半导体装置包括基板中的主动区域。主动区域在第一方向上延伸。半导体装置进一步包括栅极结构，该栅极结构在与第一方向不同的第二方向上延伸。栅极结构跨主动区域延伸。半导体装置进一步包括多个源极/漏极触点，该多个源极/漏极触点在第二方向上延伸并且在栅极结构的相对侧上重叠主动区域中的多个源极/漏极区域。多个源极/漏极触点的第一源极/漏极触点具有第一宽度，并且多个源极/漏极触点的第二源极/漏极触点具有小于第一宽度的第二宽度。
摘要（英）：

A semiconductor device includes an active region in a substrate. The active region extends in a first direction. The semiconductor device further includes a gate structure extending in a second direction different from the first direction. The gate structure extends across the active region. The semiconductor device further includes a plurality of source/drain contacts extending in the second direction and overlapping a plurality of source/drain regions in the active region on opposite sides of the gate structure. A first source/drain contact of the plurality of source/drain contacts has a first width, and a second source/drain contact of the plurality of source/drain contacts has a second width less than the first width.

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