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发明公开
CN1441460A 激光装置、激光辐射方法及半导体器件及其制造方法 失效 - 权利终止

激光装置、激光辐射方法及半导体器件及其制造方法
摘要：
提供了一种可以提高基片处理的效率的连续振荡激光装置、一种激光辐射方法，和一种用该激光装置制造半导体器件的制造方法。根据掩模来控制在图形化以后应留在基片上的半导体薄膜的部分。然后，决定要由激光扫描的部分以便可以使至少通过图形化所得到的部分晶化。同时，束斑照射到要扫描的部分。因此，将半导体薄膜部分晶化。即，根据本发明，激光不扫描和辐射半导体薄膜的整个表面而是进行扫描使至少必不可少的部分被晶化。根据上述结构，可以节省激光辐射在半导体薄膜晶化以后将要通过图形化而去除的那一部分上所用的时间。
摘要（英）：

Provided are a laser apparatus of continuous oscillation that is capable of enhancing the efficiency of substrate processing, a laser irradiation method, and a manufacturing method for a semiconductor device using the laser apparatus. A portion of a semiconductor film that should be left on a substrate after patterning is grasped in accordance with a mask. Then, a portion to be scanned with a laser light is determined so that it is possible to crystallize at least the portion to be obtained through the patterning. Also, a beam spot is made to strike the portion to be scanned. As a result, the semiconductor film is partially crystallized. That is, with the present invention, the laser light is not scanned and irradiated onto the entire surface of a semiconductor film but is scanned so that at least an indispensable portion is crystallized. With the construction described above, it becomes possible to save a time taken to irradiate the laser light onto a portion that will be removed through the patterning after the crystallization of the semiconductor film.

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