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发明公开
CN1720345A 利用薄金属层制造碳纳米管薄膜、层、织品、条带、元件及物品之方法 无效 - 驳回

利用薄金属层制造碳纳米管薄膜、层、织品、条带、元件及物品之方法
摘要：
本发明揭示使用薄金属层以制造碳纳米管薄膜、层、织物、条带、元件及制品的方法。在一基片表面施加碳纳米管生长催化剂，包括一层或更多薄层金属。该基片进行含碳气体的化学气相沉积(160)，以生长碳纳米管的非织造织物。根据界定的图案除去部分非织造织物，产生该制品。碳纳米管的非织造织物可通过在芯片基片表面施加碳纳米管生长催化剂，形成分散的单层催化剂来构成。该基片进行含碳气体的化学气相沉积，以生长接触的碳纳米管的非织造织物，并覆盖该芯片表面，而且所述织物具有基本上均匀的密度。
摘要（英）：

Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements, and Articles are disclosed. Carbon nanotube growth catalyst is applied onto a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition (160) of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst onto a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric has a substantially uniform density.

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