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发明授权
CN1812071B 基板处理装置 失效 - 权利终止

基板处理装置
摘要：
本发明提供一种基板处理装置，用于减少设置所必需的占地面积，可以用简单的结构以倾斜姿态搬送基板，降低设备成本。搬送方向转换部(40)转换搬送方向，通过该倾斜搬送部(49)，在大致维持通过第一搬送路(41)的梯度而处于倾斜姿态的状态不变的条件下，将在第一处理部(20)实施处理后的基板搬送到第二搬送路(43)。液体供给部向由此倾斜搬送部(49)搬送的基板(B)的主面供给处理液。在第二搬送路(43)以及第二处理部(30)，使由倾斜搬送部(49)保持为倾斜姿态的基板，以原姿态在与第一处理部20相反方向上进行搬送和处理。
摘要（英）：

This invention is to provide a substrate processing apparatus which contributes to reduction of costs for equipment by reducing a floor surface required for installation and carrying a board in an inclined posture by a simple mechanism. After the board is treated by a first treatment part 20, a carrying direction changing part 40 changes the carrying direction of the substrate, and its inclined carrying part 49 carries the substrate to a second carrying path 43 nearly keeping the inclined posture made by the inclination of the first carrying path 41. A liquid supplying part supplies a treatment liquid to the main surface of the substrate B carried by the inclined carrying part 49. The second carrying path 43 and a second treatment part 30 treats the substrate whose inclined posture is kept by the inclined carrying part 49, by carrying the substrate in a direction reverse to the first treatment part 20 without changing the posture.

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