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实用新型
CN203242607U 一种导向轮、基板传送装置及基板加工设备 有权

一种导向轮、基板传送装置及基板加工设备
摘要：
本实用新型公开了一种导向轮、基板传送装置及基板加工设备，其中上述基板传送装置的导向轮，包括支撑杆、内环体、以及外环体，外环体可绕其轴线旋转地套设于内环体外围；内环体可沿其轴线延伸方向滑动地套设于支撑杆的外围，支撑杆与内环体之间具有锁定支撑杆与内环体相对位置的锁止机构。上述导向轮，其外环体与基板接触的部分磨损之后，可以沿内环体的轴线延伸方向滑动上述内环体，调节内环体与支撑杆之间的位置，将外环体已磨损的部位移开，将未与基板接触的部分调节至与基板接触的位置，然后通过锁止结构锁定内环体与支撑杆之间的相对位置，从而保证导向轮可以继续使用。所以，上述导向轮中外环体的利用率较高，导向轮的使用寿命较长。
摘要（英）：

The utility model discloses a guide wheel, a substrate conveying device and substrate processing equipment. The guide wheel of the substrate conveying device comprises a supporting rod, an inner ring body, and an outer ring body, wherein the outer ring body can be sleeved on the periphery of the inner ring body around the axis of the outer ring body in a rotating manner; and the inner ring body can be sleeved on the periphery of the supporting rod along the extending direction of the axis of the inner ring body in a sliding manner, and a locking mechanism for locking the relative position between the supporting rod and the inner ring body is arranged between the supporting rod and the inner ring body. When a part, which is in contact with a substrate, of the outer ring body of the guide wheel is worn, the inner ring body can slide along the extending direction of the axis of the inner ring body, so as to adjust the position between the inner ring body and the supporting rod, the worn part of the outer ring body can be moved away, a part which is not in contact with the substrate is adjusted to a position in contact with the substrate, and the relative position between the inner ring body and the supporting rod is locked through the locking mechanism, thereby ensuring that the guide wheel can be used continually. Therefore, the utilization rate of the outer ring body in the guide wheel is high, and the service life of the guide wheel is long.

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