发明公开
- 专利标题: Photoresist composition containing a novolak resin
- 专利标题(中): 具有“酚醛清漆”塑料相片保护涂料组合物。
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申请号: EP84301389.7申请日: 1984-03-02
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公开(公告)号: EP0118291A2公开(公告)日: 1984-09-12
- 发明人: Furuta, Akihiro , Hanabata, Makoto , Yasui, Seimei , Hiroaki, Osamu , Jinno, Naoyoshi
- 申请人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 申请人地址: Kitahama 4-chome 5-33 Chuo-ku Osaka 541 JP
- 专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人: SUMITOMO CHEMICAL COMPANY, LIMITED
- 当前专利权人地址: Kitahama 4-chome 5-33 Chuo-ku Osaka 541 JP
- 代理机构: Diamond, Bryan Clive (GB)
- 优先权: JP36318/83 19830304; JP16258/84 19840131
- 主分类号: G03F7/023
- IPC分类号: G03F7/023
摘要:
A positive type photoresist composition comprises (a) a novolak resin and (b) a quinonediazide compound in wt. ratio of 1:1 to 6:1. The novolak resin is obtained by the addition condensation of a phenol and formaldehyde, in one stage by using as a catalyst an organic acid salt of a divalent metal more electropositive than hydrogen, or in two stages by using the acid catalyst in the subsequent stage, the phenol being at least one compound of formula:
wherein R is hydrogen or C1-4 alkyl group and being such that the average C number in the substituent per phenol nucleus is 0.5 to 1.5 and less than 50 mol% of the molecules have substituents at the ortho- or para-position with respect to the -OH group.
Preferred salts are acetates of Mg, Mn, Zn, Cd, Co, and Pb.
NMR spectra are shown of the resins.
The composition in solvent is coated on a support, and has a good resolving power.
wherein R is hydrogen or C1-4 alkyl group and being such that the average C number in the substituent per phenol nucleus is 0.5 to 1.5 and less than 50 mol% of the molecules have substituents at the ortho- or para-position with respect to the -OH group.
Preferred salts are acetates of Mg, Mn, Zn, Cd, Co, and Pb.
NMR spectra are shown of the resins.
The composition in solvent is coated on a support, and has a good resolving power.
公开/授权文献
- EP0118291B1 Photoresist composition containing a novolak resin 公开/授权日:1990-07-11
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