发明公开
- 专利标题: High mobility semiconductor devices
- 专利标题(中): Halbleiteranordnungen mit hoher Beweglichkeit。
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申请号: EP87200641.6申请日: 1987-04-06
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公开(公告)号: EP0241988A2公开(公告)日: 1987-10-21
- 发明人: Ralph, Hugh Ivor
- 申请人: PHILIPS ELECTRONICS UK LIMITED , Philips Electronics N.V.
- 申请人地址: 420-430 London Road Croydon CR9 3QR GB
- 专利权人: PHILIPS ELECTRONICS UK LIMITED,Philips Electronics N.V.
- 当前专利权人: PHILIPS ELECTRONICS UK LIMITED,Philips Electronics N.V.
- 当前专利权人地址: 420-430 London Road Croydon CR9 3QR GB
- 代理机构: Clark, Jane Anne (GB)
- 优先权: GB8609337 19860416
- 主分类号: H01L29/203
- IPC分类号: H01L29/203 ; H01L29/163 ; H01L29/80 ; H01L29/78 ; H01L27/08
摘要:
A high mobility p channel semiconductor device (such as a field-effect transistor) is formed suitable for operation at room temperature, for example in a circuit with an n channel device. Whereas hole modulation doping both in single heterojunction and in heterostructure quantum well devices provides a significant increase in hole mobility only at cryogenic temperatures, the present invention employs less than 5nm wide and very deep quantum wells 1 (about 0.4 eV and deeper) to reduce the effective mass of "heavy" conduction holes for motion in the plane of the quantum well 1. Hole mobilities at 300 degrees K are obtained in excess of 2.5 times those in bulk material of the same narrow bandgap semiconductor as used for the quantum well 1. In a particular example such a quantum well 1 is formed of GaAs (or GaInAs) between AlAs barrier layers 2.
公开/授权文献
- EP0241988B1 High mobility semiconductor devices 公开/授权日:1993-06-30
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