发明公开
- 专利标题: Apparatus and method for plasma treatment of resin material
- 专利标题(中): 用于等离子体处理树脂材料的装置和方法
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申请号: EP89105490.0申请日: 1984-02-23
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公开(公告)号: EP0326191A3公开(公告)日: 1991-12-27
- 发明人: Fukuta, Kenji , Kaneko, Takaoki , Takahashi, Yoshinobu
- 申请人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 申请人地址: 1, Toyota-cho Toyota-shi Aichi-ken 471 JP
- 专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人: TOYOTA JIDOSHA KABUSHIKI KAISHA
- 当前专利权人地址: 1, Toyota-cho Toyota-shi Aichi-ken 471 JP
- 代理机构: Tiedtke, Harro, Dipl.-Ing.
- 优先权: JP29371/83 19830225; JP29372/83 19830225; JP38204/83 19830310
- 主分类号: H01J37/32
- IPC分类号: H01J37/32 ; B29C59/14
摘要:
An apparatus for plasma treatment is capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber. A plasma introducing port is formed in the wall of the reaction chamber. A plasma-irradiating pipe is connected to the plasma introducing port for injecting the plasma into the reaction chamber to irradiate th surfaces of the works. A discharge port is formed in the wall of the reaction chamber to reduce the internal pressure of the reaction chamber. A plurality of the works are rotated in relation to each other about a common axis, and also individual works are rotated independently from each other about their own axes.
公开/授权文献
- EP0326191A2 Apparatus and method for plasma treatment of resin material 公开/授权日:1989-08-02
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